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Sputtered films: Ag, Al, Al-1%Si, Al2O3, Au, Co-80%Cr, Cr, Cu, Fe, Ge, Mo, Nb, Ni, Ni-20%Cr, Ni-7%V, Pt, Si, SiC, Si3N4, SiO2, Ta, TaN, TaSi2, Ta5Si3, Ti, TiN,
TiO2, Ti-90%W, W, WN, WSi2
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Evaporated films: Ag, Al, Al2O3, Au, CaF2, Cr, Cr2O3, Co, Cu, Dy, Er2O3, Ga, Ge, Hf, HfO2, In, Ir, ITO, MgF2, MgO, Mo, Nb, Ni, Pd, Pt, Re, Ru, Si, SiO, SiO2, Sn,
SnO2, Ta, Ti, TiO2, V, Y, ZnO, Zr.
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