Super-Thin Silicon MEMS

Thin Silicon Silicon Nitride Thermal Oxide Pyrex Fused Silica Quartz Germanium Zinc Gallium Nitride Gallium Arsenide Sapphire Glass Indium Phosphide




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	New Super-Thin Silicon 3" P(100) 25um DSP 1-10 ohm-cm


	*Wafer Dicing Indium Tin Oxide * Float Zone * Super-Thin & Flat Wafer Silicon 25um, 50um, 75um, 100um** For MEMS






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	MEMS


	Super-Thin Silicon, Ultra-Flat or Call them MEMS wafers! We have them!

Good news!
We now have 5um, 10um and 25um thin Si wafers!

See below for pricing. Please copy the specs you want into the form and provide quantity for your quote.

Diameter: 5mm to 4", customer size upon request.

Shape: Standard circular, Square shape available upon request.

Thickness: a) a) 5+/-0.5um; b) 10+/-1um; c) 25+/1.5um; d) 50+/-2um.
All thickness can be +/-0.5um tolerance upon customer request (additional charge applies)

Orientation: <100> Â± 0.9Â°
Dopant: Boron or Phosphorous
Resistivity: 1-20ohm-cm, low resistivity by customer request
Grow Method: Cz
Primary Flat: laser mark or on carrier substrate
Primary Flat Orientation: <110> Â± 0.7Â°
Secondary Flat Length: None
Bow: N/A Center Thickness: see thickness above
Total Thickness Variation (5 point measurement): <1.5um for all wafers, <0.5 upon request
Micro Roughness: Best effort basis
Edge Round: No Thermal Oxidation Layer (Wet Process): None
Additional Thin Film Specifications: None
Laser Marking: upon Customer request

Additional Cutting or Machining: Upon Customer Request
Other Specifications: SEMI-Standards best effort basis

For 15um thickness and above, Price Per Wafer and Quantity:

A) 5mm diameter or less:

<10 wafer @ $59.90.00 each, +10 wafer @ $49.90 each

B) 10mm diameter or less

<10 wafer @ $89.90 each, +10 wafer @ $79.90 each

C) 15mm diameter

<10 wafer @ $149.90 each, +10 wafer @ $139.90 each

D) 25.4mm diameter

<10 wafer @ $250.00 each, +10 wafer @ $230.00 each

E) 50.8mm diameter

<10 wafer @ $326.00 each, +10 wafer @ $275.00 each

F) 3" diameter

<10 wafer @ $590.00 each, +10 wafer @ $490.00 each

G) 4" diameter

<10 wafer @ $785.00 each, +10 wafer @ $685.00 each

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For 5~10um thickness or thinner: additional 25% cost applied.

2" P or N (100) 1-20 ohm-cm DSP 50um $59.90 each
3" P or N (100) 1-20 ohm-cm DSP 50um $79.90 each
4" P or N (100) 1-20 ohm-cm DSP 50um $109.90 each

6", 8" and 12" also available for thinning or backgrinding.

Thermal Oxide, Nitride and other coatings can be applied. We can dice them as well. Other diameter and other thickness available upon request. Fill out the form below.