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Silicon on Sapphire (SOS) Wafers

Below are just some of the SoS wafers that we can make.

Please provide us with your specs/quantity for an immediate quote. See bottom for more SoS inventory.


  • Substrate:
  • Material: 99.996% high purity monocrystalline Al2O3
  • Orientation: R-Plane (1-102)
  • Off-cut Non Off-cut: +/- 0.5 degree
  • Diameter: 100 +/- 0.1mm
  • Thickness: 460 +/- 20 microns
  • Primary Flat: 32.5 +/- 2.5 mm; 45 +/- 1 degree. From C on R
  • Front Surface: Finish EPI ready polished Ra
  • Bow:
  • TTV:
  • Warp:
  • Flatness (TIR):
  • Back Surface: finish as lapped (Ra=0.6 +/- 0.2 um)
  • Laser Marking: None
  • Packaging: Atmosphere Argon vacuum packed in class 100 clean room
  • Additional Notes:
  • Metallic Contamination: <5E10 atoms/cm^2 by VPD for Ca, Na, K, Cr, Zn, Fe, Cu and Ni
  • LPD: /=0.2 microns
  • Edge Exclusion: 3 mm
  • EPI Layer:
  • Thickness of Silicon (100) EPI Layer center point: 600 +/- 60nm
  • Film Crystallinity & Surface Quality: in accordance with SEMI M4-1296
  • Resistivity: >/= 100 ohm-cm (Undoped)
  • Microparticulate density (for particles greater than 2 microns): < 2 per cm^-2

SoS Inventory

Dia Orie Thick Pol Stock Price Status Grade Si thick
100mm R-plane+/-0.5° 460+/-20um SSP 50 $690.00 2-4 wks Prime 0.6um (100) Si
100mm R-plane+/-0.5° 460+/-20um SSP 2 $775.00 In Stock Prime 0.6um (100) Si
100mm R-plane+/-0.5° 460+/-20um DSP 10 $725.00 In Stock Prime 0.6um (100) Si
100mm R-plane+/-0.5° 530+/-20um DSP 4 $776.00 In Stock Prime 100+/010nm (100) Si
100mm R-plane+/-0.5° 530+/-20um DSP 4 $890.00 In Stock Prime 230+/010nm (100) Si
100mm R-plane+/-0.5° 460+/-20um SSP 4 $380.00 In Stock Dummy 1.5+/0.15um (100) Si
100mm R-plane+/-0.5° 600+/-20um SSP   Email      
100mm R-plane+/-0.5° 725+/-20um SSP   Email      

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