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3" Sapphire Wafers: Material: >99.99% single crystal Al2O3 Orientation: C Plane [0001] to M (1-100)±0.1° Diameter:
76.2mm±0.25mm Thickness: 650±25um Primary flat Orientation:A Plane [11-20] ± 0.25° Primary flat length: 22.0±1mm Front Side: Epi polished, Ra ≤ 0.30 um Back Side:
Epi polished, Ra ≤ 0.30 um /or Fine ground (Ra=0.5 to 1.2 um) TTV: ≤ 5 um BOW: ≤ 10 um WARP: ≤ 10um
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