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12-Inch SiC Wafers for Advanced Wide Bandgap Device Fabrication

12-inch (300mm) silicon carbide wafers are enabling the next wave of wide bandgap device scaling for high-voltage power electronics, EV traction inverters, fast chargers, and RF systems. This page summarizes typical 4H-SiC substrate options including N-type conductive and HPSI semi-insulating material, along with orientation/off-cut, thickness targets, and CMP-polished surface preparation used for epitaxy and device fabrication.

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Order 12-Inch Silicon Carbide Wafers

UniversityWafer, Inc. supplies 12-inch (300mm) 4H-SiC wafers for advanced research in power electronics, RF, high-temperature devices, and semiconductor education. Both N-type conductive and HPSI semi-insulating substrates are available for device fabrication, epitaxy development, and pilot-line process work.

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N-Type and HPSI 4H-SiC available for device fabrication and epitaxy.

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Researchers choose 12-inch SiC wafers for:

  • High-voltage MOSFET and diode development.
  • Wide bandgap device fabrication for EV and aerospace applications.
  • RF, mmWave, and microwave electronics research.
  • Thermal management and high-temperature reliability studies.
  • Scaling laboratory processes to 300mm-compatible toolsets.

Available Specifications

We offer a wide range of electrical and mechanical parameters to support various device architectures:

  • 4H-SiC polytype with precise off-axis orientation.
  • N-type (nitrogen) or HPSI high-resistivity material.
  • Standard 300.0 ± 0.5 mm diameter.
  • Typical thickness around 600–700 μm.
  • Si-face CMP-polished surfaces for epitaxy.

Fast Quotes & Custom Orders

If you do not see the exact parameters required for your research, our team can help source specialty wafers or provide close alternatives. For faster assistance, please include:

  • Polytype (4H-SiC)
  • Doping (N-type or HPSI)
  • Orientation and off-cut
  • Thickness
  • Resistivity range

Related Wide Bandgap and Substrate Resources

12-Inch Silicon Carbide Wafers (300mm 4H-SiC Substrates)

UniversityWafer, Inc. helps researchers and device engineers transition to 300mm (12-inch) silicon carbide wafers for next-generation power, RF, and high-temperature electronics. These large-area 4H-SiC substrates support higher throughput, larger die sizes, and scalable pilot-line production for wide bandgap device development.

Why 12-Inch Silicon Carbide Wafers?

Moving to 12-inch (300mm) SiC enables fabs and research labs to align wide bandgap process flows with mainstream silicon tools. Larger wafers:

  • Increase the total number of die per wafer for power MOSFETs, diodes, and RF devices.
  • Reduce cost per die once processes are stabilized and yields improve.
  • Allow more statistically meaningful process studies on a single wafer run.
  • Make it easier to integrate SiC unit processes into 300mm silicon pilot lines.

For universities, national labs, and industrial R&D groups, 12-inch SiC wafers provide a platform to prototype the same device architectures that will later scale into volume production.

12-Inch N-Type 4H-SiC Substrates

N-type 4H-SiC wafers are used for conductive device substrates in applications such as:

  • High-voltage power MOSFETs and Schottky diodes for EV inverters and chargers.
  • Industrial motor drives and high-efficiency power supplies.
  • High-frequency, high-power RF and microwave amplifiers.

Typical 12-inch N-type SiC substrates are:

  • Polytype: 4H-SiC with controlled off-axis orientation.
  • Dopant: Nitrogen (N-type) with resistivity measured over the central 8-inch area.
  • Diameter: 300.0 ± 0.5 mm with defined notch orientation and depth.
  • Thickness: Representative values around 600–700 µm for mechanical stability.
  • Front surface: Si-face, ground and CMP-polished for epitaxy.
  • Back surface: C-face, ground and polished to support good thermal and electrical contact.

The following table summarizes typical 12-inch N-type 4H-SiC substrate specifications:

Item Unit Dummy Grade Production Grade
Polytype--4H4H
Surface orientation°4° toward [11-20] ± 0.5°
Dopant--N-type (Nitrogen)
ResistivityΩ·cmMeasured over the central 8-inch area
Diametermm300.0 ± 0.5
Thicknessμm600 ± 50 / 700 ± 50
Notch orientation°<1-100> ± 5°
Notch depthmm1 – 1.25
Micropipe densityea/cm²NA< 10;
Front side--Si-face
Front surface finish--Grinding, Si-face CMP
Back finish--Grinding, C-face polished
Edge--No chamferChamfer
Packaging--Multi/single-wafer cassette; vacuum-sealed foil

12-Inch HPSI 4H-SiC Substrates

High-purity semi-insulating (HPSI) 4H-SiC wafers are used wherever the substrate must have extremely high resistivity and minimal parasitic conduction. Typical applications include RF and microwave monolithic integrated circuits (MMICs) and high-frequency power amplifiers.

HPSI 12-inch wafers typically feature:

  • Polytype: 4H-SiC with near-zero off-cut (<0001> orientation).
  • Doping: Nominally undoped with very high resistivity.
  • Front surface: Si-face CMP-polished for low-defect epitaxial growth.
Item Unit Production Grade
Polytype--4H
Surface orientation°<0001> ± 0.2°
Dopant--None (HPSI)
Diametermm300.0 ± 0.5
Thicknessμm600 ± 50 / 700 ± 50
Micropipe densityea/cm²< 5; No aggregation
Front side--Si-face
Surface finish (front)--Si-face CMP
Back finish--C-face polished
Edge--Chamfer

Applications in Research and Education

UniversityWafer, Inc. works with both industrial and academic users who are exploring wide bandgap devices for:

  • Electric vehicles, charging infrastructure, and on-board power conversion.
  • Renewable energy inverters, energy storage interfaces, and smart grid hardware.
  • High-frequency communications, radar, and aerospace electronics.

We support single-wafer evaluation, small lots for process development, and larger quantities for pilot lines and teaching labs. To receive pricing, lead time, and availability on 12-inch N-type or HPSI SiC wafers, please use our online store or request a quote.