Fused Silica Wafers UV, JGS1, JGS2, JGS3 Grades

University Wafer Silicon Wafers and Semicondcutor Substrates Services
University Silicon Wafer for Production

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What other Fused Silica Specs do Researchers Ask For?


I was looking for 10 -20 diced fused silica samples 20 mm x 20 mm with a thickness of 1 mm.

We Quoted:

Diameter: 20 x 20mm
Thickness: 1+/-0.025mm
Surface: Double Side Polished
Grade: JGS1
OH Content: <1,200ppm
Warp: <30um
Bow: <30um
TTV: <10um
Roughness: <1nm
Scratch/Dig: 60/40

Can you make 49x49x1mm fused silica wafer?

We Quoted
49x49x1mm, DSP
1 Corner chamfered
UV Grade(JGS1) and Standard Grade (JGS2)

What Fused Silica Substrates Are Used to Make FS Mirror?

Fused Silica Mirrors -coated with metallic mineral on one side of the wafer.

Fused Silica Wafer UV Grade(JGS1)
2 inch diameter and (2 mm and 2.5 mm thicknesses)
Optical specifications:
Surface Flatness: wave/4 (PV) @633 nm
Surface irregularities < 5 nm
Scach-dig: 60/40

Gold Coated Fused Silica

We can deposit gold onto fused silica wafers. Recently a research client asks the following:

The material of wafer: Fused Silica
Thickness: 100um
Diameter: 50.8mm

In addition, I want a partial coating on those thin wafer.

Metalization: Gold (Au)
Mask: Diameter: 0.5...1.5 mm circular area (blue) coated with gold and with 3.3mm pitch between coated areas.

Au coated fused silica

Please ignore those black circles and the drawing is not a true scale. I would update it.

fused silica circles

Large Selection of Fused Silica Wafers

Below are just some of the fused silica wafers that we have in stock. We have smaller and larger dimaeters with very thick and very thin availble. Please ask us about our deposition services.

Please email us your specs or buy online here!



Thick (um)


50.8mm 500um DSP

JGS2 Fused Silica Top side Ra <1nm, Backside Roughness Ra <1nm, S/D 40/20

50.8mm 100um DSP
76.2mm 500um DSP

1 Flat JGS2 Primary Flat 32.5+/-2mm, Top Side Ra <10A, S/D 40/20

100mm 500um DSP

Mechanical Grade Fused Silica

100mm 500 um DSP
100mm 1000um DSP

Fused Silica JGS2 Warp <30um Bow <30um, TTV <10um, Top side Ra <1.0nm Backside Ra <1.0nm, S/D 60/40 Flat: 32.5+/-2mm

100mm 700um DSP
100mm 180um DSP

Fused Silica Wafer, JGS2, C Bevel, 2.50 mm +/- 0.10 mm

100mm 2500um DSP

Fused Silica Substrates to Evaluate The Thermal Expansion and Fluorescence/Auto-Fluorescence Properties

A research client asked:

Question 1: Looking for 150mm (6”) LiNbO3 substrates, 500um thick, 128 degree Y-cut, SAW grade, DSP Double Side Polished, Notched (SEMI standard notch), Serialized (Need serialized) also since these are delicate, do you offer them on glass? Minimum order quantity and would be ramping up to Volume quantities of: 200, 800, 1500, and 3000 wafers Question 2: 150mm (6") Quartz wafers, DSP, 635um SEMI Notch, Serialized (or what other thicknesses available) (Single Crystal X-Cut) Looking for this in any or all of these materials – Quartz, Fused quartz, Fused Silica We specifically are evaluating the Thermal Expansion and Fluorescence/ auto-fluorescence properties. Minimum quantity, lead time.  

UniversityWafer, Inc. Reply

 Diameter Material  Orientation  Thickness Surface Finish  Primary Flat Brand/Grade Warp Bow TTV Top side Ra Backside Ra Remark 
150+/-0.3mm LiNbO3 128Y-cut 0.5+/-0.03mm DSP NOTCH or 47.5+/-2.5mm on+Z SAW <40um <40um <10um <1nm <1nm JAR
Diameter Brand/Grade Thickness Surface Finish  Primary Flat Material  Bow TTV Top side Ra Backside Ra package shipment term pay term 
150+/-0.3mm JGS2 635+/-25um DSP 47.5+/-1.5mm Fused quartz <40um <10um <1nm <1nm Jar ex-work T/T AD
150+/-0.3mm JGS1 635+/-25um DSP 47.5+/-1.5mm Fused Silica <40um <10um <1nm <1nm Jar ex-work T/T AD
Diameter Material  Orientation  Thickness Surface Finish  Primary Flat Brand/Grade SEED Top side Ra Backside Ra shipment term    
150+/-0.5mm Quartz Crystal X-cut 0.635+/-0.05mm DSP 57.5+/-2.5mm SAW withseed <1nm <1nm ex-work    


What is the Difference Between Fused Silica and Fused Quartz?

This is a large concept, there are many different materials for fused quartz and Fused Silica .
Fused Quartz is defined as a material made by melting high purity, naturally occurring quartz crystal. The melting is conducted at around 2000°C, using either an electrically heated furnace (electrically fused) or a gas/oxygen fueled furnace (flame fused). Fused quartz is amorphous and non-crystalline.

Residual impurities from the raw material affect Fused Quartz transparency in the ultraviolet. Such as JGS2,

Fused Silica (also known as Synthetic Fused Silica) is made from a silicon-rich chemical precursor, usually using a continuous flame hydrolysis process, which involves chemical gasification of silicon, oxidation of this gas to silicon dioxide, and thermal fusion of the resulting dust (although there are alternative processes).
This results in a transparent glass with an ultra-high purity and improved optical transmission in the deep ultraviolet. Water vapor, generated as a byproduct during the fabrication process,
affects the transparency of fused silica in the infrared. Such as Corning 7979, 7980 JGS1, JGS3 etc

How do You Serialize Fused Silica Windows

We can laser mark our Fused Silica, Fused Quartz and Lithium Niobate (LiNbO3) Substrates