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150mm Silicon Wafers - All Diameters and Specifications

150mm (6 inch) silicon wafers are a popular size for microfabrication process development, equipment qualification, and research labs that need reliable silicon substrates without moving to 200mm or 300mm lines. UniversityWafer offers 150mm wafers in CZ or float zone (FZ) material with p-type or n-type doping, standard orientations such as (100), (111), and (110), and surface finishes including SSP and DSP. Choose prime, test, or mechanical grades based on your process sensitivity and budget, then request a fast quote or buy online for in-stock items.

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When were 150mm Silicon Wafers Introduced?

Introduced in 1983, 150mm (5.9 inch, usually referred to as "6 inch") wafers can use the CZ or FZ method for ingot growth.

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150mm Silicon Wafer Growth is Strong

This is impressive growth, supported by a variety of applications such as "More Moore's Devices."

6 inch semiconductor wafer

Mechanical Grade Wafers in Neurobiological Research

Researchers from the Tata Institute of Fundamental Research are using our 150mm SSP silicon wafers in Microfluidic Devices.

Silicon Used for Eddy-Current Measurements

"I use the wafers as test objects to verify my eddy-current measurement setup... they are ideal for my application."

Si Item #1575: 100mm P/B <100> 0.01-0.02 ohm-cm 525um SSP Prime

How are Silicon Substrates Used?

  1. Thickness Measurement: Primary use for eddy current measurements.
  2. Material Defect Analysis: Identify defects within the substrate.
  3. Doping Level Determination: Conductivity affects the substrate properties.

Millimeter-Wave Photoconductive Switches

University scientist: "We need really low loss silicon for one state, and long carrier lifetime for the other."

Quoted: 150mm Undoped high resistivity silicon >1000 ohm*cm wafers DSP.

Microreactor Array Device

Researchers from University of Arizona used: 150mm 675um+/-25um.

microreactor array

150mm (6 Inch) Silicon Wafer Inventory

ItemDiaTypeDopantOrient.Res (Ω-cm)Thick (μm)PolishGradeDescription
478150mm--N/A-650SSPMECHLow cost Si Wafer, great for spin coating.
857150mmPB<100>0-10620SSPTestTest Grade Silicon, great for studies.
1025150mmN-<100>0-100625SSPTestN-type Test Grade.
2880150mmPB<100>0.006-0.012525SSPTestWith Oxide Back Seal.
3071150mmPB<100>1-100500SSPTest2 SEMI-STD FLATS.
1383150mmUndoped-<100>>10,000650SSPPrimeFloat Zone (FZ), High Resistivity.
2476150mmN/P-<100>2k-10k675SSPPrimeFloat Zone (FZ).
2312150mmPB<100>0.01-0.02675P/EEPIWith EPI layer.
UW1972150mmNPhos<100>2000-8000320P/EPrimeFloat Zone (FZ), Thin.
E870150mmNPhos<111>0.001-0.014605P/PPrimeDouble Side Polished (DSP), FZ.

Available Dopants

  • Boron Doped Silicon
  • Antimony Doped Silicon
  • Arsenic Doped Silicon
  • Undoped Silicon
  • Gallium Doped Silicon

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