When were 150mm Silicon Wafers Introduced?
Introduced in 1983, 150mm (5.9 inch, usually referred to as "6 inch") wafers can use the CZ or FZ method for ingot growth.
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150mm Silicon Wafer Growth is Strong
This is impressive growth, supported by a variety of applications such as "More Moore's Devices."
Mechanical Grade Wafers in Neurobiological Research
Researchers from the Tata Institute of Fundamental Research are using our 150mm SSP silicon wafers in Microfluidic Devices.
Silicon Used for Eddy-Current Measurements
"I use the wafers as test objects to verify my eddy-current measurement setup... they are ideal for my application."
Si Item #1575: 100mm P/B <100> 0.01-0.02 ohm-cm 525um SSP Prime
How are Silicon Substrates Used?
- Thickness Measurement: Primary use for eddy current measurements.
- Material Defect Analysis: Identify defects within the substrate.
- Doping Level Determination: Conductivity affects the substrate properties.
Millimeter-Wave Photoconductive Switches
University scientist: "We need really low loss silicon for one state, and long carrier lifetime for the other."
Quoted: 150mm Undoped high resistivity silicon >1000 ohm*cm wafers DSP.
Microreactor Array Device
Researchers from University of Arizona used: 150mm 675um+/-25um.

150mm (6 Inch) Silicon Wafer Inventory
UniversityWafer supplies 150mm (6 inch) silicon wafers in a variety of conductivity types, dopants, crystal orientations, resistivity ranges, thicknesses, polish configurations, and grades. Browse the current inventory below to find a substrate for your research or fabrication requirements.
| Item | Dia | Type | Dopant | Orient. | Res (Ω-cm) | Thick (μm) | Polish | Grade | Description |
|---|---|---|---|---|---|---|---|---|---|
| 478 | 150mm | - | - | N/A | - | 650 | SSP | MECH | Low cost Si Wafer, great for spin coating. |
| 857 | 150mm | P | B | <100> | 0-10 | 620 | SSP | Test | Test Grade Silicon, great for studies. |
| 1025 | 150mm | N | - | <100> | 0-100 | 625 | SSP | Test | N-type Test Grade. |
| 2880 | 150mm | P | B | <100> | 0.006-0.012 | 525 | SSP | Test | With Oxide Back Seal. |
| 3071 | 150mm | P | B | <100> | 1-100 | 500 | SSP | Test | 2 SEMI-STD FLATS. |
| 1383 | 150mm | Undoped | - | <100> | >10,000 | 650 | SSP | Prime | Float Zone (FZ), High Resistivity. |
| 2476 | 150mm | N/P | - | <100> | 2k-10k | 675 | SSP | Prime | Float Zone (FZ). |
| 2312 | 150mm | P | B | <100> | 0.01-0.02 | 675 | P/E | EPI | With EPI layer. |
| UW1972 | 150mm | N | Phos | <100> | 2000-8000 | 320 | P/E | Prime | Float Zone (FZ), Thin. |
| E870 | 150mm | N | Phos | <111> | 0.001-0.014 | 605 | P/P | Prime | Double Side Polished (DSP), FZ. |
Why Use 150mm (6 Inch) Silicon Wafers?
150mm silicon wafers, also called 6-inch silicon wafers, provide a useful balance between usable surface area, handling convenience, equipment compatibility, and cost. They are widely used for semiconductor research, MEMS, sensors, thin-film deposition, photonics, process development, and university cleanroom fabrication.
UniversityWafer supplies 150mm silicon substrates with a variety of conductivity types, dopants, crystal orientations, resistivity ranges, thicknesses, polish configurations, and grades. This allows researchers to select a substrate based on the electrical, mechanical, optical, and processing requirements of their experiment.
Choosing the Right 150mm Silicon Wafer
The best wafer specification depends on the fabrication process and intended device. When comparing the 150mm wafers in our inventory, consider the following parameters:
Crystal Orientation
<100> silicon is commonly used in semiconductor processing, MOS devices, MEMS, and general microfabrication. <111> silicon has different crystallographic and etching behavior and may be preferred for specialized MEMS, surface-science, and device applications.
P-Type vs. N-Type Silicon
Silicon conductivity is controlled through doping. P-type silicon is commonly produced using boron, while n-type silicon is commonly produced using phosphorus, arsenic, or antimony. The appropriate conductivity type depends on the electrical characteristics required by the device or experiment.
Silicon Wafer Resistivity
Resistivity, expressed in Ω·cm, is an important electrical specification. Low-resistivity silicon is heavily doped and may be useful when a conductive substrate is required. Higher-resistivity silicon reduces substrate conduction and can be advantageous for RF, microwave, detector, photonic, and specialized electronic applications.
Our inventory includes both conventional resistivity ranges and high-resistivity Float Zone (FZ) silicon, including material exceeding 10,000 Ω·cm when available.
Float Zone (FZ) 150mm Silicon Wafers
Float Zone silicon is produced without holding the molten silicon in a quartz crucible during crystal growth. As a result, FZ silicon typically has lower oxygen content than conventional Czochralski (CZ) silicon and can be produced with very high resistivity.
High-resistivity FZ wafers are especially useful for applications such as RF and microwave devices, radiation and particle detectors, terahertz research, photonics, power-device research, and semiconductor characterization.
SSP vs. DSP Silicon Wafers
Single-side polished (SSP) wafers have one polished device surface and are suitable for many standard fabrication, coating, deposition, and research processes.
Double-side polished (DSP) wafers provide polished surfaces on both sides. DSP substrates can be useful for optical transmission, MEMS, wafer bonding, backside processing, lithography, and applications requiring improved surface quality on both faces.
Prime, Test, and Mechanical Grade Wafers
UniversityWafer offers different wafer grades so researchers can select material appropriate for both performance requirements and budget.
- Prime Grade: High-quality wafers intended for demanding semiconductor fabrication, device development, and research.
- Test Grade: Cost-effective silicon wafers suitable for process development, equipment testing, thin-film deposition, coating experiments, teaching, and many research applications.
- Mechanical Grade: Economical wafers useful when semiconductor-grade electrical specifications are unnecessary, including handling tests, spin coating, equipment setup, and mechanical experiments.
Common Applications for 150mm Silicon Wafers
- Semiconductor device fabrication
- MEMS and microsensor development
- Thin-film deposition and coating research
- Photolithography and process development
- RF and microwave research
- Photonics and optical devices
- Radiation and particle detectors
- Wafer bonding and backside processing
- Spin coating and materials research
- University cleanroom training and education
Available Dopants
150mm silicon wafers may be available with different dopants depending on the required conductivity type and resistivity. Available material can include:
- Boron-Doped Silicon (P-Type)
- Phosphorus-Doped Silicon (N-Type)
- Antimony-Doped Silicon (N-Type)
- Arsenic-Doped Silicon (N-Type)
- Undoped Silicon
- Gallium-Doped Silicon (P-Type)
Need a Different 150mm Wafer Specification?
The inventory above represents available and commonly requested specifications. If your project requires a different resistivity, thickness, orientation, dopant, polish, grade, or Float Zone specification, contact UniversityWafer with your required parameters and quantity.
Related 150mm Silicon Wafer Resources
- Silicon Wafers and Substrates – explore additional silicon wafer diameters and specifications.
- Silicon Wafer Orientation Guide – learn about <100>, <110>, and <111> silicon.
- Prime Grade Silicon Wafers – substrates for demanding fabrication and research.
- Float Zone Silicon Wafers – learn about high-purity and high-resistivity FZ silicon.
- Ultra-Thin Silicon Wafers – explore reduced-thickness silicon substrates.
- Silicon Wafer Applications – discover common research and device applications for silicon substrates.