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150mm Silicon Wafers - All Diameters and Specifications

150mm (6 inch) silicon wafers are a popular size for microfabrication process development, equipment qualification, and research labs that need reliable silicon substrates without moving to 200mm or 300mm lines. UniversityWafer offers 150mm wafers in CZ or float zone (FZ) material with p-type or n-type doping, standard orientations such as (100), (111), and (110), and surface finishes including SSP and DSP. Choose prime, test, or mechanical grades based on your process sensitivity and budget, then request a fast quote or buy online for in-stock items.

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When were 150mm Silicon Wafers Introduced?

Introduced in 1983, 150mm (5.9 inch, usually referred to as "6 inch") wafers can use the CZ or FZ method for ingot growth.

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150mm Silicon Wafer Growth is Strong

This is impressive growth, supported by a variety of applications such as "More Moore's Devices."

6 inch semiconductor wafer

Mechanical Grade Wafers in Neurobiological Research

Researchers from the Tata Institute of Fundamental Research are using our 150mm SSP silicon wafers in Microfluidic Devices.

Silicon Used for Eddy-Current Measurements

"I use the wafers as test objects to verify my eddy-current measurement setup... they are ideal for my application."

Si Item #1575: 100mm P/B <100> 0.01-0.02 ohm-cm 525um SSP Prime

How are Silicon Substrates Used?

  1. Thickness Measurement: Primary use for eddy current measurements.
  2. Material Defect Analysis: Identify defects within the substrate.
  3. Doping Level Determination: Conductivity affects the substrate properties.

Millimeter-Wave Photoconductive Switches

University scientist: "We need really low loss silicon for one state, and long carrier lifetime for the other."

Quoted: 150mm Undoped high resistivity silicon >1000 ohm*cm wafers DSP.

Microreactor Array Device

Researchers from University of Arizona used: 150mm 675um+/-25um.

microreactor array

150mm (6 Inch) Silicon Wafer Inventory

UniversityWafer supplies 150mm (6 inch) silicon wafers in a variety of conductivity types, dopants, crystal orientations, resistivity ranges, thicknesses, polish configurations, and grades. Browse the current inventory below to find a substrate for your research or fabrication requirements.

ItemDiaTypeDopantOrient.Res (Ω-cm)Thick (μm)PolishGradeDescription
478150mm--N/A-650SSPMECHLow cost Si Wafer, great for spin coating.
857150mmPB<100>0-10620SSPTestTest Grade Silicon, great for studies.
1025150mmN-<100>0-100625SSPTestN-type Test Grade.
2880150mmPB<100>0.006-0.012525SSPTestWith Oxide Back Seal.
3071150mmPB<100>1-100500SSPTest2 SEMI-STD FLATS.
1383150mmUndoped-<100>>10,000650SSPPrimeFloat Zone (FZ), High Resistivity.
2476150mmN/P-<100>2k-10k675SSPPrimeFloat Zone (FZ).
2312150mmPB<100>0.01-0.02675P/EEPIWith EPI layer.
UW1972150mmNPhos<100>2000-8000320P/EPrimeFloat Zone (FZ), Thin.
E870150mmNPhos<111>0.001-0.014605P/PPrimeDouble Side Polished (DSP), FZ.

Why Use 150mm (6 Inch) Silicon Wafers?

150mm silicon wafers, also called 6-inch silicon wafers, provide a useful balance between usable surface area, handling convenience, equipment compatibility, and cost. They are widely used for semiconductor research, MEMS, sensors, thin-film deposition, photonics, process development, and university cleanroom fabrication.

UniversityWafer supplies 150mm silicon substrates with a variety of conductivity types, dopants, crystal orientations, resistivity ranges, thicknesses, polish configurations, and grades. This allows researchers to select a substrate based on the electrical, mechanical, optical, and processing requirements of their experiment.

Choosing the Right 150mm Silicon Wafer

The best wafer specification depends on the fabrication process and intended device. When comparing the 150mm wafers in our inventory, consider the following parameters:

Crystal Orientation

<100> silicon is commonly used in semiconductor processing, MOS devices, MEMS, and general microfabrication. <111> silicon has different crystallographic and etching behavior and may be preferred for specialized MEMS, surface-science, and device applications.

P-Type vs. N-Type Silicon

Silicon conductivity is controlled through doping. P-type silicon is commonly produced using boron, while n-type silicon is commonly produced using phosphorus, arsenic, or antimony. The appropriate conductivity type depends on the electrical characteristics required by the device or experiment.

Silicon Wafer Resistivity

Resistivity, expressed in Ω·cm, is an important electrical specification. Low-resistivity silicon is heavily doped and may be useful when a conductive substrate is required. Higher-resistivity silicon reduces substrate conduction and can be advantageous for RF, microwave, detector, photonic, and specialized electronic applications.

Our inventory includes both conventional resistivity ranges and high-resistivity Float Zone (FZ) silicon, including material exceeding 10,000 Ω·cm when available.

Float Zone (FZ) 150mm Silicon Wafers

Float Zone silicon is produced without holding the molten silicon in a quartz crucible during crystal growth. As a result, FZ silicon typically has lower oxygen content than conventional Czochralski (CZ) silicon and can be produced with very high resistivity.

High-resistivity FZ wafers are especially useful for applications such as RF and microwave devices, radiation and particle detectors, terahertz research, photonics, power-device research, and semiconductor characterization.

SSP vs. DSP Silicon Wafers

Single-side polished (SSP) wafers have one polished device surface and are suitable for many standard fabrication, coating, deposition, and research processes.

Double-side polished (DSP) wafers provide polished surfaces on both sides. DSP substrates can be useful for optical transmission, MEMS, wafer bonding, backside processing, lithography, and applications requiring improved surface quality on both faces.

Prime, Test, and Mechanical Grade Wafers

UniversityWafer offers different wafer grades so researchers can select material appropriate for both performance requirements and budget.

  • Prime Grade: High-quality wafers intended for demanding semiconductor fabrication, device development, and research.
  • Test Grade: Cost-effective silicon wafers suitable for process development, equipment testing, thin-film deposition, coating experiments, teaching, and many research applications.
  • Mechanical Grade: Economical wafers useful when semiconductor-grade electrical specifications are unnecessary, including handling tests, spin coating, equipment setup, and mechanical experiments.

Common Applications for 150mm Silicon Wafers

  • Semiconductor device fabrication
  • MEMS and microsensor development
  • Thin-film deposition and coating research
  • Photolithography and process development
  • RF and microwave research
  • Photonics and optical devices
  • Radiation and particle detectors
  • Wafer bonding and backside processing
  • Spin coating and materials research
  • University cleanroom training and education
150mm 6 inch silicon wafer applications for semiconductor devices, MEMS, photonics, solar cells, thin-film deposition and radiation detectors

Available Dopants

150mm silicon wafers may be available with different dopants depending on the required conductivity type and resistivity. Available material can include:

  • Boron-Doped Silicon (P-Type)
  • Phosphorus-Doped Silicon (N-Type)
  • Antimony-Doped Silicon (N-Type)
  • Arsenic-Doped Silicon (N-Type)
  • Undoped Silicon
  • Gallium-Doped Silicon (P-Type)

Need a Different 150mm Wafer Specification?

The inventory above represents available and commonly requested specifications. If your project requires a different resistivity, thickness, orientation, dopant, polish, grade, or Float Zone specification, contact UniversityWafer with your required parameters and quantity.

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