Spin-on-Glass (SoG) for Semiconductor Applications

University Wafer Silicon Wafers and Semicondcutor Substrates Services
University Silicon Wafer for Production

Benefits of Spin-on-Glass

Compared to gas diffusion doping, Spin-on doping uniformity is better. The variance across a wafer is between 0.5% and 1% and variance from wafer to wafer ranges between 1% - 2%.

Get Your Quote FAST!


Spin On Glass

We have developed a new method for using steam treatment of fluoroalkoxysilanes (FSi) at room temperature (FAST). We # Ve developed the world's first VTA system (Vapor-to-Vapor) for use in glass and the first commercial application of this technology in the glass manufacturing sector. We have developed a novel method for the application of fluoroalkoxysilanes and FSI steam treatments ("FAST"). At room temperatures we have used a brand new high-performance evaporator system, the "VTA." [Sources: 0]

The device [11] is used to illustrate the effect of FSI spin on glass on the glass surface, and there are two different types of spin - on - glass ("spin - off" and "spin - in") described here. [Sources: 5]

The results of this research show that a composite of polyvinyl acetate polymer left, reinforced with glass fiber, can be used as an alternative to wood replacement. A rotating glass filled with recesses in a patterned metal layer is shown [12]. [Sources: 1, 9]

In addition, there are still many applications of spin-on glass technology, and these applications are gaining the various benefits discussed here. Spin on glass can satisfy new applications and their needs and can form compounds that differ in their chemical composition and properties. The substituents have a high binding energy to silica and dissolve when the spun glass layer is exposed to high temperatures during curing. [Sources: 3, 5]

In addition, the inventive TEOG - TEOS Spin - on glass has an additional advantage: there is no stress - altered flexibility of the glass based on spin. Through experiments we have found that the spinning glass described here, if processed correctly, can overcome the aforementioned disadvantages. In our work, the use of a solution - treated dielectric based on diluted deionized water - was successfully presented as a viable solution for the production of a powerful, cost-effective and environmentally friendly spin on glasses. [Sources: 5, 6]

The planarized spin - on glass (SOG) - forms next to the first silicon oxide layer. The high selectivity of etching is crucial to remove the previous etching step and protect the metal from etching. In our work, the suction is applied to a glass layer and the CVD (silicon oxide barrier layer) is slowly etched. At the same time, the "etch recirculation" is carried out using reactive ion etching (RIE) under conditions that etch the SOG at the same speed as the glass layers, but at a much slower rate. [Sources: 1, 4, 8]

Another problem that makes etching - reprocessing - on glass layers more difficult is that the thick spinning film also detaches from the substrate during subsequent processing. Here the spin on glasses can become very thin and is a big step, which is connected with the use of stacked capacitors. Even in the case of a thin layer of etched spun glass, the exposed edges can lead to interlevel shorting and other reliability problems. Another problem that annoys the etch-back process is regions where a significant step is embedded in the underlying substrate, such as on the surface of the glass layer. [Sources: 1, 3]

Spin on glass can become quite thin when using the spin-coater process, especially with thin glass layers. [Sources: 1]

The spin - on glass composition in this invention is stable, even if it is increased to a temperature of more than 1,000 degrees Celsius (3,500 degrees Fahrenheit). The reaction, which lasts two hours or more at ambient temperature, will effectively influence the composition of the glasses. Spin of glass occurs in alloys that are known to be resistant to the effects of high temperatures, such as high pressure, high heat and high humidity. At minus degrees there is no significant effect on the properties of the alloy or on its magnetism, which seems to be practically unused in daily life. [Sources: 2, 3, 7]

The present invention concerns a coating solution using a semiconductor product commonly referred to as spin - on glass composition. This is a liquid silicon mixture that can be applied to the surface of semiconductors on a wafer and then spun to create the coating layer on the top. In this technique, the spin on the glass composition fills the recessed areas of the wafer resulting from various insulating and conductive regions. For example, a spin of glass materials can be either a siloxane - a base material marketed under the trade name accuglass by Allied Signal Corp. - or a glass - a material such as glass. [Sources: 1, 3]

Although the spin on glass as a liquid precursor has a levelling effect, the thickness fluctuates greatly due to the underlying substrate. [Sources: 1, 3]

One disadvantage of spin on the glass composition is that it cannot control the plasma etching rate or the produced layer, as it is sensitive to the O 2 concentration. This minimises the micro-loading that would otherwise lead to non-flat surfaces that would be created by micro-loading. Although gasification can be eliminated by removing the metal, a number of other problems associated with etching on the back may occur, some of which are normally carried out with a plasma etching device, such as lack of selectivity. [Sources: 1, 3]

 

 

Sources:

[0]: https://shibaura.pure.elsevier.com/en/publications/spin-on-glass-film-treatment-technology-using-a-fluoroalkoxysilan

[1]: https://www.google.fr/patents/US5461010

[2]: https://en.wikipedia.org/wiki/Spin_glass

[3]: https://patents.google.com/patent/US5152834A/en

[4]: https://www.freepatentsonline.com/5747381.html

[5]: http://www.google.com/patents/US5910680

[6]: http://www.scielo.org.mx/scielo.php?script=sci_arttext&pid=S0035-001X2016000300282

[7]: https://scitechdaily.com/new-whirling-state-of-matter-discovered-self-induced-spin-glass/

[8]: https://www.google.com.na/patents/US5631197

[9]: https://www.science.gov/topicpages/s/spin-on+glass+sog.html

Spin-on-Glass

Spin on glass (SOG) mixes  SiO2 and  either boron or phosphorous. The mixture is suspended in a solvent solution. SOG should only be spin-coated onto a particle free silicon.  

Semiconductor applications for Spin-On Glass include, but are not limited to the following:

 

Solar Cell

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • 300 Non-doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass.
  • Magnesium doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate
  • Medium Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica *ultrahigh purity
  • Heavier Zinc doped spin-on glass silica
  • Heavy Zinc Arsenic doped spin-on glass silica
  • Heavy Zinc Phosphorous doped spin-on glass silica

 

Planarization Trench Fill, Smoothing & Masking

  • 300 Non-doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Light doped, compound SOG
  • Heavy doped, compound SOG
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate
  • 1100A Non-doped spin-on glass titanate

Waveguides

  • 300 Non-doped spin-on glass silica
  • Heavy Neodymium doped high RI spin-on glass silica
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica

Liquid Crystal Display (LCD)

  • 300 Non-doped spin-on glass silica
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica

Wafer Bonding

  • 300 Non-doped spin-on glass silica
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica

Diodes & Transistors

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • 300 Non-doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass
  • Magnesium doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate
  • 1100A Non-doped spin-on glass titanate

Light Emitting Diode (LED) & Infrared (IR) Detector

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Silicate gallium and boron doped glass
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass.
  • Magnesium doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Medium Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica *ultrahigh purity
  • Heavier Zinc doped spin-on glass silica

Photonics

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • 300 Non-doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass.
  • Magnesium doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate

Super Conductor

  • Heavy Barium doped spin-on glass silica
  • Heavy Copper doped spin-on glass silica
  • Heavy Yttrium doped spin-on glass silica
  • Heavy Yittrium Barium Copper doped compound spin-on glass silica superconductor precursor