Spin-on-Glass (SoG) for Semiconductor Applications

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Benefits of Spin-on-Glass

Compared to gas diffusion doping, Spin-on doping uniformity is better. The variance across a wafer is between 0.5% and 1% and variance from wafer to wafer ranges between 1% - 2%.

Spin-on-Glass

Spin on glass (SOG) mixes  SiO2 and  either boron or phosphorous. The mixture is suspended in a solvent solution. SOG should only be spin-coated onto a particle free silicon.  

Semiconductor applications for Spin-On Glass include, but are not limited to the following:

 

Solar Cell

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • 300 Non-doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass.
  • Magnesium doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate
  • Medium Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica *ultrahigh purity
  • Heavier Zinc doped spin-on glass silica
  • Heavy Zinc Arsenic doped spin-on glass silica
  • Heavy Zinc Phosphorous doped spin-on glass silica

 

Planarization Trench Fill, Smoothing & Masking

  • 300 Non-doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Light doped, compound SOG
  • Heavy doped, compound SOG
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate
  • 1100A Non-doped spin-on glass titanate

Waveguides

  • 300 Non-doped spin-on glass silica
  • Heavy Neodymium doped high RI spin-on glass silica
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica

Liquid Crystal Display (LCD)

  • 300 Non-doped spin-on glass silica
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica

Wafer Bonding

  • 300 Non-doped spin-on glass silica
  • 500A Non-doped spin-on glass silica
  • 800A Non-doped spin-on glass silica
  • 1000A Non-doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica

Diodes & Transistors

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • 300 Non-doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass
  • Magnesium doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate
  • 1100A Non-doped spin-on glass titanate

Light Emitting Diode (LED) & Infrared (IR) Detector

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Silicate gallium and boron doped glass
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass.
  • Magnesium doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Medium Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica
  • Heavy Zinc doped spin-on glass silica *ultrahigh purity
  • Heavier Zinc doped spin-on glass silica

Photonics

  • Heavy Aluminium doped spin-on glass silica
  • Medium Arsenic doped spin-on glass silica
  • 300 Non-doped spin-on glass silica
  • Medium Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heavy Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Heaviest Boron doped spin-on glass silica
  • Lightly Boron doped spin-on glass silica *available in ultrahigh purity only
  • Heavy Barium doped spin-on glass silica
  • Heavy Gallium doped spin-on glass silica
  • Heavy Gallium Aluminium doped compound spin-on glass silica
  • Heavy Indium doped spin-on glass silica
  • Heavy Lithium doped spin-on glass silica
  • Heavy lithium phosphorous doped compound spin-on glass.
  • Magnesium doped spin-on glass silica
  • 2000A Non-doped spin-on glass silica
  • 3000 Non-doped spin-on glass silica
  • 5000A Non-doped spin-on glass silica
  • 7000A Non-doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Lightly Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Medium Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heavy Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heaviest Phosphorous doped spin-on glass silica
  • Heavy Antimony doped spin-on glass silica
  • Heavy Tin doped spin-on glass silica
  • Lightly Silica-doped spin-on glass titanate
  • Compound Spin-on glass titanate/silica
  • 1000A Non-doped spin-on glass titanate

Super Conductor

  • Heavy Barium doped spin-on glass silica
  • Heavy Copper doped spin-on glass silica
  • Heavy Yttrium doped spin-on glass silica
  • Heavy Yittrium Barium Copper doped compound spin-on glass silica superconductor precursor