Double Side Polished (DSP) Silicon Wafers TTV < 1 micron

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Double Side Polished (DSP) Silicon Wafers

We have a large selection of ultra-flat double side polished prime grade and test grade silicon wafers in all diameters, thickness, orientation and resistivities. We have Total Thickness Variations as tight as 1 micron TTV in stock.

In order to increase the flatness of a silicon wafer is to polish the back-side of the wafer. The double side polishiing helps reduce the roughness of the silicon wafer surfaces. This is a must when making MEMS devices where super flat and low roughness specs are required.

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Gettering and Double Side Polished Silicon Wafers

It is interesting to note that borosilicate (BSG) and phosphosilicate (PSG) glass when contacting heated silicon are very good at removing a silicon wafer's deep impurities.

Double Side Polishing a must fror ultra-thin-silicon wafers.

We can make single side polished silicon wafers to 50 micron with tight TTV, but thinner than this requires the more expensive back side polishing to keep the wafers from warping.

Use double side polished silicon wafers when you need tighter TTV, BOW and WARP tolerances.

Below are just some of the double side polished wafers with the tightest TTV

The following are CZ Wafers unless otherwise noted. The wafers are SEMI prime with either a one or two flats or notch. The Total Thickness Variation is <1 μm, Bow <5μm, Warp, <10μm. All the wafers are Prime grade and are shipped in sealed hard plastic cassettes.

Item Type/Dop Ori. Dia(mm) Thk(μm) Polish Res Ωcm
6971 n-type Si:P [100--25° towards[110] ±1° 6" 675 DSP 1--100
S5594 p-type Si:B [100] 5" 990 ±8 DSP 1--25
D868 p-type Si:B [100] 5" 590 DSP 1--30
F709 n-type Si:P [100] 5" 762 ±12 DSP 5--35
S6284 n-type Si:P [100] ±1° 4" 200 ±10 DSP FZ >1,000
G706 Intrinsic Si:- [100] 4" 500 DSP FZ >20,000
6356 Intrinsic Si:- [100] 4" 500 DSP FZ >20,000
J302 p-type Si:B [100] 4" 600 DSP 1--50
7089 p-type Si:B [100] 4" 381 ±7 DSP 0.014--0.021
F022 p-type Si:B [111] ±0.3° 4" 350 ±5 DSP <0.05
6570 n-type Si:P [100] 4" 400 DSP 1--10
4975 n-type Si:Sb [211] ±0.5° 4" 1,500 ±15 DSP 0.01--0.02
S962 Intrinsic Si:- [100] 4" 525 DSP FZ >20,000
D796 p-type Si:B [100] 4" 500 DSP 1--30
L302 p-type Si:B [100] 4" 625 DSP 1--50
Q787 p-type Si:B [111] ±0.5° 4" 350 DSP 0.001--0.005
J066 n-type Si:P [100] 4" 500 DSP 1--100
4154 p-type Si:B [110] ±0.5° 3" 360 DSP 1--10
6826 p-type Si:B [100] 3" 475 DSP 1--50
D750 p-type Si:B [100] 3" 420 DSP <1
S5580 n-type Si:P [100] ±1° 3" 2,286 ±13 DSP 15--28
S5824 n-type Si:P [100] ±1° 3" 300 ±10 DSP 5--15
6400 n-type Si:P [100] 3" 350 DSP 1--25
6818 n-type Si:P [100] 3" 381 DSP 1--30
H988 p-type Si:B [100] 3" 580 DSP 1--100