3 Inch Silicon Wafers (76.2mm)

Research and production grade silicon substrates. We stock Prime, Test, and Mechanical grade 3-inch wafers with standard and custom thermal oxide, nitride, or metal coatings available.

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⚡ Researcher's Favorite

3 Inch Mechanical Grade
Type: P/Boron or N/Phos
Thickness: 380µm
Polish: Single Side Polished (SSP)
Perfect for spin coating, practice handling, and dummy runs.

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Need a specific resistivity or double-side polish?3 inch silicon wafer great for microfluidic research and more

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Why Buy 3 Inch Wafers?

  • Cost Effective: Lower cost per wafer compared to 100mm or 150mm silicon wafers.
  • Legacy Equipment: Fits older SEM, sputtering, and spin coating chucks found in university labs.
  • Availability: We keep massive stock of 3" wafers, ready to ship today.

In-Stock 3 Inch Inventory

We stock the widest variety of 76.2mm wafers. Below are our most popular specifications.

Type Dopant Orientation Resistivity Thickness Grade Link
P-Type Boron <100> 1-10 ohm-cm 380µm Prime Buy
N-Type Phos <100> 1-10 ohm-cm 380µm Prime Buy
P-Type Boron <111> 0.001-0.005 380µm Test Buy
Undoped None <100> >10,000 380µm Float Zone Buy
Any Any Any Any ~380µm Mechanical Buy

Application Spotlights

🔬 For SEM Imaging & Microscopy

Recommended Spec: Highly conductive (Low Resistivity) P-type or N-type.

Client Story: A biochemistry scientist needed substrates for high-resolution SEM imaging. The critical requirement was a conductive surface to prevent charge accumulation. We recommended and supplied Low Resistivity (0.001-0.02 ohm-cm) silicon wafers, which ensure a clean, smooth path for electrons, resulting in crisp imaging without charging artifacts.

Reference Case #220876

🌀 For Spin Coating & Mechanical Testing

Recommended Spec: Mechanical Grade.

Client Story: A biomedical engineering PhD candidate was looking for "3 inch diameter metallic wafers" (silicon) specifically for spin coating experiments. Since the surface would be coated, they preferred a cost-effective option without extra treatments. We recommended Mechanical Grade wafers. These provide the correct geometry and surface adhesion properties for spin coating but at a significantly lower price point than Prime grade.

Reference Case #102048

🧪 For Microfluidics & Cell Sorting

Recommended Spec: Prime Grade, <100> Orientation.

Researchers at Harvard and CNRS have used our Item #978 (3" P<100> Prime) to fabricate droplet-based microfluidic devices. The ultra-flat Prime surface is essential for bonding to PDMS and creating leak-proof channels for single-cell analysis.


Standard 3 Inch Wafer Specifications

Understanding the geometry of a 3-inch wafer is crucial for handling and alignment.

  • Diameter: 76.2mm ± 0.3mm
  • Thickness: 380µm ± 25µm (Standard)
  • Primary Flat Length: 22.22mm ± 3.17mm
  • Secondary Flat: Indicates doping type (P-type vs. N-Type) and Orientation (<100> vs <111>) according to SEMI standards.