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Microfluidic Chips have channels etched into the silicon wafers on the micrometer scale. The channel is used to control
the flow of fluids using MEMS pumps.
We can help you with your microfluidic chips. Any questions regarding photolithography, sputtering, deep reactive ion etching on silicon wafers. We can also help with metal depostion.
Some of our wafers have a Total Thickness Variation (TTV) 1 micron to help with your Micromechanical (MEMS) research.