Deep Reactive-Ion Etching (DRIE)

University Wafer Silicon Wafers and Semicondcutor Substrates Services
University Silicon Wafer for Production

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Deep Reactive-Ion Etching (DRIE)

Our research clients have provided feedback on which wafers they use for DRIE.

The wafers are as expected - good quality. Thank you!

We use them for etching with DRIE some precursors as part of the fabrication of X-ray micro-lenses.

Si Item# 1116 Silicon
100mm P/B <100> 10-20 ohm-cm 500um SSP

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