Silicon Pillar

university wafer, a researcher's best friend
University Silicon Wafer for Production

Get Your Quote FAST!


 

Silicon Wafers to Make Silicon Pillars

A client recently requested a quote for silicon wafers with 2 micron of thermal oxide that would help them form silicon pillars.

Question:

What Silicon Wafer specs with around 2um oxide film, and we use them to form a SiO2 structure on a Si pillar through etching. However, I am not sure the resistivity and dopant. Because SiO2 is the most important structure in our work, I am wondering whether the resistivity and dopant will influence the quality of SiO2 grown out of Si? If they influence, to what degree? Answer:

Even the most heavily doped wafers, with the most volatile dopant (Arsenic) do not seem to affect the quality of Thermal Oxide grown on them. The morphology is the same and breakdown voltage seems to be unaffected.
Still, we recommend lightly doped wafers that are Si:B[100] (1-100)Ohmcm.

We sell this item Si Item #783 - 100mm P/B <100> 1-10 ohm-cm 500um SSP Prime Grade

Silicon Pillar created using silicon wafers with 2 micron of thermal oxide deposited. Even the most heavily doped silicon wafers, with the most volatile dopant (Arsenic) do not seem to affect the quality of Thermal Oxide grown on them. The morphology is the same and breakdown voltage seems to be unaffected.