A scientist asked us the following:
I have questions about the quality of Si wafers. So we want wafers that will help us determine dep rate, unif, etc. but only need quality good enough to accurately measure results repeatably. I am assuming TEST wafers good enough for that?
See below for the answer!
A scientist asked us the following:
I have questions about the quality of Si wafers. So we want wafers that will help us determine dep rate, unif, etc. but only need quality good enough to accurately measure results repeatably. I am assuming TEST wafers good enough for that?
These would be run using a variety of processes, from sputtering, to PECVD, etc. Why would someone need to get PRIME grade silicon?
Also, we are going to use a number of wafers for dummies in a LCPVD process, where they will be going in and out of the chamber for a number of runs. For that, should we be using TEST wafers? Or MECHANICAL grade good enough there? In the dummy case, no measurements will be done on the wafers. They will just get thicker and thicker coatings over time, until they get replaced. Please advise
A couple of different things we are using the wafers for.
1 . we need some for verifying Dep Rates and RI of films on Si. So the quality there needs to be good enough for that. So is TEST wafer sufficient, or do we need PRIME for that? If so, why?
2. We need dummy wafers to put into LPCVD tool to take up spare slots during deposition. We won't do any measurements on these, and they will go in multiple times, maybe for up to 6 months so long they are not flaking. Are MECH grade wafers good enough for that, or will they flake more quickly than TEST wafers. If so, why?
If you can answer these questions for us, we will place an order for 2 different types of Si wafers.
UniversityWafer, Inc. Replied:
SEMI standards are the specifications covering the physical and chemical characteristics of Silicon wafers.
SEMI defines Prime and Test grades of wafers. According to SEMI, the two grades are the same, except that Test wafers are allowed to have some polishing imperfections, most notably scratches and surface dust particles. Chemically they are the same. Test grade was established for the very purpose that you plan to use the wafers, that is to be the monitor wafers for doping and film deposition processes.
In common usage, Test grade wafers are those that have any polishing imperfections or those that have been on the shelf for a long time. Old wafers have an extra thick layer of "native oxide" that forms over time and shows up as "haze" during inspection. One needs to check into the nature of the imperfections to make sure that they do not affect deposition rates in LPCVD or PECVD reactors and Refractive index measurements. In most cases commonly named Test grade wafers are entirely adequate as monitor wafers.
In common usage, Mechanical grade wafers can have any crystallographic orientation and any kind and degree of doping, as long as they conform to geometric specifications. One needs to check if the dopants or dust particles on such wafers can contaminate the process. For example, Arsenic can easily evaporate from such wafers when they are heated in vacuum. In most cases commonly named Mechanical grade wafers are adequate as spacer wafers.
P-type, N-type, Undoped all in stock.
Below is just a short list of the test grade silicon substrates that we have in stock!
Dia(mm) |
Typ |
Dop |
Ori |
Pol |
PFL length |
PFL direction |
Res Ohm-cm |
Thck (µm) |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 340 ± 10 |
100 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 0.010 - 0.025 | 300 ± 5 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.022 | 310 ± 5 |
100 ± 0.2 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.005 - 0.020 | 300 ± 2.5 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.008 - 0.022 | 400 ± 10 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.03 | 600 ± 15 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 420 ± 5 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 520 ± 5 |
100 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 0.010 - 0.025 | 315 ± 5 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 420 ± 5 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 380 ± 10 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 355 ± 10 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 500 ± 10 |
100 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 0.010 - 0.025 | 300 ± 5 |
100 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.005 - 0.020 | 525 ± 25 |
100 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.005 - 0.020 | 525 ± 25 |
100 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.025 | 315 ± 3 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 380 ± 10 |
100 ± 0.2 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.005 - 0.020 | 300 ± 2.5 |
100.0 ± 0.5 | N+ | Sb | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 380 ± 10 |
100 ± 0.5 | N+ | As | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.001 - 0.005 | 380 ± 10 |
100.0 ± 0.3 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.020 | 327 ± 5 |
100.0 ± 0.3 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.015 - 0.020 | 381 ± 7 |
100 ± 0.5 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 525 ± 25 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.5 - 10 | 318 ± 12.7 |
100 ± 0.15 | P | B | 110 | DSP | 32.5 ± 2.5 | 111 ± 0,10 | 5--10 | 200 ± 15 |
100 ± 0.5 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 200 ± 10 |
100 ± 0.38 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.5 - 10 | 889 ± 12.7 |
100.0 ± 0.2 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.1 - 0.5 | 380 ± 5 |
100 ± 0.38 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.5 - 10 | 508 ± 12.7 |
100 ± 0.5 | P | B | 111 | DSP | 32.5 ± 2.5 | 110 ± 1 | 10--20 | 525 ± 25 |
100.0 ± 0.2 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 8--10 | 225 ± 10 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 3--5 | 350 ± 10 |
100 ± 0.3 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--5 | 225 ± 5 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1--20 | 350 ± 15 |
100 ± 0.2 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,30 | < 0.020 | 300 ± 15 |
100 ± 0.38 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.5 - 10 | 318 ± 12.7 |
100 ± 0.5 | P+ | B | 111 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.0034 - 0.004 | 450 ± 5 |
100 ± 0.15 | P | B | 110 | DSP | 32.5 ± 2.5 | 111 ± 0,10 | > 1 | 381 ± 15 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--10 | 280 ± 10 |
100 ± 0.2 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 1--10 | 490 ± 5 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 5--10 | 525 ± 5 |
100 ± 0.5 | P | B | 110 | DSP | 32.5 ± 2.5 | 111 ± 0,20 | 5--10 | 380 ± 5 |
100.0 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 5--7 | 483 ± 25 |
100 ± 0.2 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 2--4 | 280 ± 5 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--7 | 300 ± 5 |
100 ± 0.3 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--5 | 390 ± 10 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--7 | 385 ± 5 |
100 ± 0.2 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 1--10 | 490 ± 20 |
100.0 ± 0.3 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.015 - 0.020 | 381 ± 7 |
100 ± 0.3 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1 - 100 | 202 ± 4 |
100 ± 0.3 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1 - 100 | 302 ± 4 |
100 ± 0.5 | P | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--7 | 385 ± 5 |
100 ± 0.2 | P+ | B | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.025 | 500 ± 25 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.5 - 1.0 | 385 ± 5 |
100.0 ± 0.5 | N | Ph | 111 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 1--10 | 300 ± 3 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 2--4 | 260 ± 2 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 2--4 | 300 ± 2 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1--10 | 350 ± 15 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 3--5 | 525 ± 5 |
100 ± 0.5 | N | Ph | 111 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--8 | 450 ± 10 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 2--4 | 220 ± 2 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1--3 | 368 ± 10 |
100 ± 0.2mm | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 0.20 - 0.25 | 380 ± 5 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 2--6 | 381 ± 6 |
100.0 ± 0.5 | N | Ph | 111 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--10 | 350 ± 3 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 10--20 | 300 ± 10 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1.4 - 6.0 | 445 ± 5 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 5--8 | 300 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1--3 | 368 ± 10 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.05 - 0.5 | 525 ± 25 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--5 | 300 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 2--4 | 400 ± 2 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 10--20 | 300 ± 10 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--5 | 200 ± 4 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--10 | 500 ± 15 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,25 | 1--10 | 300 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | 1 - 100 | 360 ± 10 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--10 | 380 ± 5 |
100 ± 0.2 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 1--10 | 350 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 1--3 | 280 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.05 - 0.5 | 525 ± 25 |
100 ± 0.2 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,30 | 2--10 | 380 ± 5 |
100.0 ± 0.2 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 0.04 - 20 | 400 ± 10 |
100 ± 0.2 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,30 | 2--10 | 300 ± 5 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 3--5 | 525 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.5 - 1.0 | 485 ± 5 |
100 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | 0.5 - 1.0 | 385 ± 5 |
100.0 ± 0.5 | N | Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 1 | 10--20 | 300 ± 10 |
100 ± 0.25 | N+ | Red Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,20 | < 0.0015 | 250 ± 5 |
100 ± 0.25 | N+ | Red Ph | 100 | DSP | 32.5 ± 2.5 | 110 ± 0,50 | < 0.0015 | 380 ± 5 |
100 ± 0.3 | N+ | As | 111 | SSP | 32.5 ± 2.5 | 110 ± 1 | < 0.005 | 381 ± 15 |
Dia(mm) |
Type |
Dopant |
Ori |
Pol |
PFL length |
PFL direction |
Res Ohm-cm |
Thck (µm) |
150.0 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,30 | 0.005 - 0.020 | 380 ± 5 |
150 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.005-0.02 | 215-235 |
150.0 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 011 ± 0,30 | 0.005 - 0.020 | 380 ± 5 |
150 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | < 0.020 | 400 ± 10 |
150 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 400 ± 15 |
150 ± 0.5 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 425 ± 5 |
150.0 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,30 | 0.005 - 0.020 | 380 ± 5 |
150.0 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 011 ± 0,30 | 0.005 - 0.020 | 380 ± 5 |
150.0±0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 0.010-0.020 | 375-385 |
150 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 325 ± 5 |
150 ± 0.2 | N+ | Sb | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 300 ± 10 |
150.0 ± 0.2 | N+ | As | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | <0.0035 | 430 ± 5 |
150.0 ± 0.2 | N+ | As | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | <0.0035 | 430 ± 5 |
150 ± 0.2mm | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.005 - 0.025 | 400 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1 - 20 | 400 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 2.55 - 3.45 | 400 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--5 | 650 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 0.017 - 0.022 | 381 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | >1 | 525 ± 12.5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--5 | 450 ± 10 |
150.0 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.007 - 0.020 | 400 ± 25 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | < 0,005 | 625 ± 15 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 500 ± 25 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 0.5 | 110 ± 0,30 | 2--10 | 380 ± 4 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 600 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 0.07 - 0.13 | 500 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--5 | 300 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.001 - 0.02 | 650 ± 5 |
150.0 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 6 - 8.5 | 380 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.020 - 0.025 | 300 ± 7.5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 2.4 - 3.6 | 400 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 0.5 | 110 ± 0,30 | > 0.3 | 400 ± 50 |
150.0 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 6 - 8.5 | 380 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--5 | 400 ± 5 |
150.0 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 0.07 - 0.13 | 380 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.020 | 1000 ± 5 |
150 ± 0.3 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 30 - 50 | 300 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 2 - 20 | 310 ± 10 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.005 - 0.025 | 290 ± 10 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.005 - 0.025 | 400 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 525 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 3--5 | 390 ± 7 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.0 | 110 ± 1 | 5 - 8.5 | 525 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 3--7 | 385 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--10 | 400 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--10 | 600 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 70 - 130 | 1000 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1 - 10 | 400 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,25 | 1--10 | 280 ± 1.5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--10 | 650 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 400 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 100 ± 0,50 | 5--7 | 483 ± 5 |
150.0 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 380 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 600 ± 5 |
150 ± 0.5 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 620 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 1--10 | 600 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | > 10 | 625 ± 15 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 1--3 | 380 ± 12 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 525 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 2.4 - 3.6 | 400 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 2.4 - 3.6 | 400 ± 10 |
150.0 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,20 | 1--10 | 675 ± 5 |
150 ± 0.3 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 30 - 50 | 300 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 300 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 525 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--10 | 250 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 283.5 ± 2.5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--10 | 650 ± 5 |
150 ± 0.5 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.020 | 500 ± 10 |
150 ± 0.5 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.020 | 500 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 390 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 3--7 | 385 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 435 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 435 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 450 ± 5 |
150±0.2mm | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.020 - 0.025 | 381 -10+5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.020 - 0.025 | 300 ± 7.5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 390 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 1 | 10 - 50 | 400 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 1 | 10 - 50 | 455 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 1 | 10 - 50 | 475 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 70 - 130 | 1000 ± 10 |
150 ± 0.3 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.050 | 400 ± 7 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 525 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 5 - 100 | 380 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 600 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--5 | 650 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 1--10 | 380 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 15 - 25 | 400 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 390 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 390 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 435 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 15 - 25 | 525 ± 5 |
150.0 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 6 - 8.5 | 380 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 5 - 8.5 | 525 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 5 - 8.5 | 525 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 0.015 - 0.025 | 800 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 6 - 8.5 | 380 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 5 - 8.5 | 525 ± 5 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.007 - 0.020 | 300 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 47.5 ± 2.5 | 110 ± 1 | 1--10 | 400 ± 20 |
150.0 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 6 - 8.5 | 380 ± 10 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 0.015 - 0.025 | 800 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 390 ± 5 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 483 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 2.4 - 3.6 | 400 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 385 ± 5 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 2.55 - 3.45 | 400 ± 10 |
150 ± 0.2 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 400 ± 10 |
150 ± 0.5 | P | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 30-Jan | 600 ± 10 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.020 | 300 ± 10 |
150 ± 0.2 | P+ | B | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.015 - 0.025 | 800 ± 5 |
150 ± 0.5 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1.5 ± 0.5 | 280 ± 2.5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--4 | 375-425 |
150 ± 0.5 | N | Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 8--24 | 525 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--4 | 400 ± 10 |
150.0 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--3 | 400 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--4 | 325-375 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.5 - 2.0 | 400 ± 20 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--25 | 400 ± 10 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 10--20 | 450 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 10--20 | 450 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3 - 9 | 300 ± 10 |
150 ± 0.5 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1.5 ± 0.5 | 280 ± 2.5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 2--7 | 325 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.5 - 2.0 | 400 ± 5 |
150 ± 0.5 | N | Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 8--24 | 525 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 625 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 1.4 - 6.0 | 390 ± 5 |
150 ± 0.5 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--5 | 390 ± 5 |
150 | N | Ph | 100 | DSP | 57.5 ± 2.0 | 110 ± 1 | 3--7 | 380 ± 1 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,10 | 5--7 | 450 ± 15 |
150 ± 0.5 | N | Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 8--24 | 525 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.0 | 110 ± 1 | 3--7 | 600 ± 5 |
150 ± 0.5 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 250 ± 4.5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.5 - 2.0 | 300 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.5 - 2.0 | 300 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 0.5 - 1.0 | 495 ± 5 |
150 ± 0.2 | N | Ph | 110 | DSP | 57.5 ± 2.5 | 110 ± 1 | 4--10 | 1300 ± 15 |
150 ± 0.15 | N | Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 1 | 1--5 | 550 ± 4 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--4 | 250 ± 10 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.0 | 110 ± 1 | 3--7 | 600 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.0 | 110 ± 1 | 3--7 | 380 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.675 - 1.125 | 400 ± 5 |
150 ± 0.5 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 15 ± 30% | 675 ± 20 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 625 ± 5 |
150.0 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 1--10 | 600 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 3--7 | 625 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 1--4 | 375-425 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,30 | 1--10 | 550 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 10--20 | 450 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,20 | 3--7 | 380 ± 5 |
150 ± 0.5 | N | Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | 8--24 | 525 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 1--10 | 400 ± 5 |
150 ± 0.2 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 10.5 - 19.5 | 675 ± 20 |
150 ± 0.5 | N | Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 1 | 0.5 - 2.0 | 400 ± 10 |
150.0 ± 0.2 | N+ | Red Ph | 100 | DSP | 57.5 ± 2.5 | 011 ± 1 | 0.01 - 0.02 | 380 ± 10 |
150 ± 0.2 | N+ | Red Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.02 | 300 ± 5 |
150 ± 0.5 | N+ | Red Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,20 | < 0.0019 | 400 ± 5 |
150 ± 0.5 | N+ | Red Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,50 | < 0.002 | 625 ± 5 |
150 ± 0.2 | N+ | Red Ph | 100 | DSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.010 - 0.020 | 400 ± 5 |
150 ± 0.5 | N+ | Red Ph | 100 | DSP | 47.5 ± 2.5 | 110 ± 0,20 | < 0.0019 | 400 ± 5 |
150 ± 0.5mm | N+ | Sb | 100 | SSP | 47.5 ± 2.5 | 110 ± 2 | 0.007 - 0.020 | 625 ± 25 |
150 ± 0.5 | P+ | B | 100 | SSP | 57.5 ± 2.5 | 100 ± 1 | 0.001 - 100 | 675 ± 200 |
150 ± 0.5 | P | B | 100 | SSP | 57.5 ± 2.5 | 110 ± 0,50 | > 0.3 | 400 ± 50 |
150 ± 0.5 | P+ | B | 100 | SSP | 47.5 ± 2.5 | 110 ± 1 | 0.010 - 0.020 | 508 ± 15 |
150 ± 0.2 | N | Ph | 111 | SSP | 57.5 ± 2.5 | 110 ± 1 | 4 - 8 | 650 ± 50 |
150 ± 0.2 | N | Ph | 111 | SSP | 57.5 ± 2.5 | 110 ± 1 | 0.75 - 5.00 | 675 ± 25 |
150 ± 0.2 | N | Ph | 111 | SSP | 57.5 ± 2.5 | 110 ± 1 | 0.75 - 5.00 | 675 ± 25 |
150 ± 0.5 | N+ | Sb | 100 | SSP | 47.5 ± 2.5 | 011 ± 1 | 0.008 - 0.016 | 550 ± 15 |
150 ± 0.5 | N+ | Sb | 100 | SSP | 47.5 ± 2.5 | 011 ± 1 | 0.008 - 0.016 | 400 ± 15 |
150 ± 0.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.005-0.030 | 1000 ± 20 |
150 ± 0.5 | N+ | Sb | 100 | SSP | 57.5 ± 2.5 | 110 ± 0,50 | 0.01 - 0.025 | 1000 ± 30 |
150 ± 0.5 | N+ | Sb | 111 | SSP | 57.5 ± 2.5 | 110 ± 1 | 0.01 - 0.02 | 625 ± 15 |
Dia(mm) |
Type |
Dopant |
Ori |
Pol |
PFL length |
PFL direction |
Res Ohm-cm |
Thck (µm) |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 10 ± 3 | 725 ± 5 |
200 ± 0.2 | P+ | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 0.01 - 0.02 | 850 ± 5 |
200 ± 0.5 | P+ | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 0.01 - 0.02 | 1000 ± 25 |
200 ± 0.5 | P+ | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 0.13 - 0.15 | 725 ± 10 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 30-Jan | 720 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 2-Jan | 725 ± 20 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 10 - 100 | 550 ± 25 |
200 ± 0.2 | P+ | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 0.005 - 0.020 | 710 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 011 ± 1 | 10 - 200 | 1500 ± 25 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 1--10 | 650 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,20 | 1--10 | 400 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,20 | 1--10 | 650 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | Jun-36 | 1000 ± 15 |
200 ± 0.5 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | May-40 | 500 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 30-Jan | 720 ± 5 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 1--10 | 1000 ± 25 |
200 ± 0.2 | P | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 1--10 | 725 ± 5 |
200 ± 0.2 | P+ | B | 100 | DSP | 0.0 ± 0.0 | 110 ± 0,50 | 0.010 - 0.020 | 300 ± 5 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | May-40 | 440 ± 5 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 1--10 | 725 ± 5 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 1--10 | 600 ± 10 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 2 - 20 | 725 ± 15 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 2-Jan | 725 ± 20 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 011 ± 1 | May-40 | 440 ± 5 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 011 ± 1 | May-40 | 440 ± 5 |
200 ± 0.5 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 1--5 | 650 ± 5 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 0.7 - 5.0 | 500 ± 10 |
200 ± 0.2 | N | Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | Jan-50 | 725 ± 20 |
200 ± 0.2 | N+ | Red Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 0.001 - 0.002 | 725 ± 25 |
200 ± 0.2mm | N+ | Red Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 0.010 - 0.020 | 500 ± 10 |
200 ± 0.2 | N+ | Red Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | 0.001 - 0.002 | 725 ± 25 |
200 ± 0.2 | N+ | Red Ph | 100 | DSP | 0.0 ± 0.0 | 110 ± 1 | < 0.0015 | 725 ± 15 |
200 ± 0.2 | P | B | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | Jan-50 | 725 ± 25 |
199.8-200.2mm | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.007-0.02 | 710-740 |
199.8-200.2mm | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.007-0.02 | 710-740 |
199.8-200.2mm | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.007-0.02 | 710-740 |
200 ± 0.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.008 - 0.020 | 725 ± 15 |
200 ± 0.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.005 - 0.020 | 725 ± 10 |
200 ± 0.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 011 ± 1 | 0.005 - 0.020 | 725 ± 15 |
199.8-200.2mm | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.007-0.02 | 710-740 |
200 ± 0.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.008 - 0.020 | 725 ± 15 |
200 ± 0.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.01 - 0.02 | 500 ± 5 |
199.8-200.2 | N+ | Sb | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 0.007-0.02 | 710-740 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 110 ± 0,50 | 0.003-0.006 | 675 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 100 ± 1 | 0.002-0.003 | 725 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 100 ± 1 | 0.001 - 0.003 | 725 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 100 ± 1 | 0.002-0.003 | 725 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 010 ± 1 | < 3 m | 725 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 010 ± 1 | < 3 m | 725 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 110 ± 1 | 1 - 4 m | 725 ± 15 |
200 ± 0.2 | N+ | As | 111 | SSP | 0.0 ± 0.0 | 110 ± 1 | 1 - 4 m | 725 ± 15 |
200 ± 0.2 | N+ | As | 100 | SSP | 0.0 ± 0.0 | 100 ± 1 | 0.0022-0.003 | 725 ± 15 |