Test Grade Silicon Wafers for Research and Production

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Are Test Grade Silicon Wafers Good for My Research?

A scientist asked us the following:

I have questions about the quality of Si wafers. So we want wafers that will help us determine dep rate, unif, etc. but only need quality good enough to accurately measure results repeatably. I am assuming TEST wafers good enough for that?

These would be run using a variety of processes, from sputtering, to PECVD, etc. Why would someone need to get PRIME grade silicon?

Also, we are going to use a number of wafers for dummies in a LCPVD process, where they will be going in and out of the chamber for a number of runs. For that, should we be using TEST wafers? Or MECHANICAL grade good enough there? In the dummy case, no measurements will be done on the wafers. They will just get thicker and thicker coatings over time, until they get replaced. Please advise

A couple of different things we are using the wafers for.

1 . we need some for verifying Dep Rates and RI of films on Si. So the quality there needs to be good enough for that. So is TEST wafer sufficient, or do we need PRIME for that? If so, why?

2. We need dummy wafers to put into LPCVD tool to take up spare slots during deposition. We won't do any measurements on these, and they will go in multiple times, maybe for up to 6 months so long they are not flaking. Are MECH grade wafers good enough for that, or will they flake more quickly than TEST wafers. If so, why?

If you can answer these questions for us, we will place an order for 2 different types of Si wafers.

UniversityWafer, Inc. Replied:

SEMI standards are the specifications covering the physical and chemical characteristics of Silicon wafers.

SEMI defines Prime and Test grades of wafers. According to SEMI, the two grades are the same, except that Test wafers are allowed to have some polishing imperfections, most notably scratches and surface dust particles. Chemically they are the same. Test grade was established for the very purpose that you plan to use the wafers, that is to be the monitor wafers for doping and film deposition processes.

In common usage, Test grade wafers are those that have any polishing imperfections or those that have been on the shelf for a long time. Old wafers have an extra thick layer of "native oxide" that forms over time and shows up as "haze" during inspection. One needs to check into the nature of the imperfections to make sure that they do not affect deposition rates in LPCVD or PECVD reactors and Refractive index measurements. In most cases commonly named Test grade wafers are entirely adequate as monitor wafers.

In common usage, Mechanical grade wafers can have any crystallographic orientation and any kind and degree of doping, as long as they conform to geometric specifications. One needs to check if the dopants or dust particles on such wafers can contaminate the process. For example, Arsenic can easily evaporate from such wafers when they are heated in vacuum. In most cases commonly named Mechanical grade wafers are adequate as spacer wafers.

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We have a large selection of test grade silicon wafers

P-type, N-type, Undoped all in stock.

Below is just a short list of the test grade silicon substrates that we have in stock!

100mm Silicon Test Grade Wafers

Dia(mm) Typ Dop Ori Pol PFL length PFL direction Res Ohm-cm Thck (µm)
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  340 ± 10 
100 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,20 0.010 - 0.025  300 ± 5 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.010 - 0.022  310 ± 5 
100 ± 0.2 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.005 - 0.020  300 ± 2.5  
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.008 - 0.022  400 ± 10 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.01 - 0.03  600 ± 15 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.01 - 0.02  420 ± 5 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.01 - 0.02  520 ± 5 
100 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,20 0.010 - 0.025  315 ± 5 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.01 - 0.02  420 ± 5 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  380 ± 10 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  355 ± 10 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  500 ± 10 
100 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,20 0.010 - 0.025  300 ± 5 
100 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.005 - 0.020  525 ± 25 
100 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.005 - 0.020  525 ± 25 
100 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 0,50 0.010 - 0.025  315 ± 3 
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  380 ± 10 
100 ± 0.2 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.005 - 0.020  300 ± 2.5  
100.0 ± 0.5 N+ Sb 100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  380 ± 10 
100 ± 0.5 N+ As    100 DSP 32.5 ± 2.5 110 ± 0,50 0.001 - 0.005  380 ± 10 
100.0 ± 0.3 P+ B      100 DSP 32.5 ± 2.5 110 ± 0,50 0.01 - 0.020  327 ± 5 
100.0 ± 0.3 P+ B      100 DSP 32.5 ± 2.5 110 ± 1 0.015 - 0.020  381 ± 7 
100 ± 0.5 P+ B      100 DSP 32.5 ± 2.5 110 ± 0,50 0.01 - 0.02  525 ± 25 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 1 0.5 - 10  318 ± 12.7 
100 ± 0.15 B      110 DSP 32.5 ± 2.5 111 ± 0,10 5--10 200 ± 15 
100 ± 0.5 P+ B      100 DSP 32.5 ± 2.5 110 ± 1 0.010 - 0.020  200 ± 10 
100 ± 0.38 B      100 DSP 32.5 ± 2.5 110 ± 0,50 0.5 - 10  889 ± 12.7 
100.0 ± 0.2 B      100 DSP 32.5 ± 2.5 110 ± 1 0.1 - 0.5  380 ± 5 
100 ± 0.38 B      100 DSP 32.5 ± 2.5 110 ± 1 0.5 - 10  508 ± 12.7 
100 ± 0.5 B      111 DSP 32.5 ± 2.5 110 ± 1 10--20 525 ± 25 
100.0 ± 0.2 B      100 DSP 32.5 ± 2.5 110 ± 0,50 8--10 225 ± 10 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 1 3--5 350 ± 10 
100 ± 0.3 B      100 DSP 32.5 ± 2.5 110 ± 0,50 1--5 225 ± 5 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 1 1--20 350 ± 15 
100 ± 0.2 P+ B      100 DSP 32.5 ± 2.5 110 ± 0,30 < 0.020  300 ± 15 
100 ± 0.38 B      100 DSP 32.5 ± 2.5 110 ± 1 0.5 - 10  318 ± 12.7 
100 ± 0.5 P+ B      111 DSP 32.5 ± 2.5 110 ± 1 0.0034 - 0.004  450 ± 5 
100 ± 0.15 B      110 DSP 32.5 ± 2.5 111 ± 0,10 > 1  381 ± 15 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 0,50 1--10 280 ± 10 
100 ± 0.2 B      100 DSP 32.5 ± 2.5 110 ± 0,20 1--10 490 ± 5 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 0,50 5--10 525 ± 5 
100 ± 0.5 B      110 DSP 32.5 ± 2.5 111 ± 0,20 5--10 380 ± 5 
100.0 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 1 5--7 483 ± 25 
100 ± 0.2 B      100 DSP 32.5 ± 2.5 110 ± 0,20 2--4 280 ± 5 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 0,50 3--7 300 ± 5 
100 ± 0.3 B      100 DSP 32.5 ± 2.5 110 ± 0,50 1--5 390 ± 10 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 0,50 3--7 385 ± 5 
100 ± 0.2 B      100 DSP 32.5 ± 2.5 110 ± 0,20 1--10 490 ± 20 
100.0 ± 0.3 P+ B      100 DSP 32.5 ± 2.5 110 ± 1 0.015 - 0.020  381 ± 7 
100 ± 0.3 B      100 DSP 32.5 ± 2.5 110 ± 1 1 - 100  202 ± 4 
100 ± 0.3 B      100 DSP 32.5 ± 2.5 110 ± 1 1 - 100  302 ± 4 
100 ± 0.5 B      100 DSP 32.5 ± 2.5 110 ± 0,50 3--7 385 ± 5 
100 ± 0.2 P+ B      100 DSP 32.5 ± 2.5 110 ± 0,50 0.010 - 0.025  500 ± 25 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 0.5 - 1.0  385 ± 5 
100.0 ± 0.5 Ph 111 DSP 32.5 ± 2.5 110 ± 0,20 1--10 300 ± 3 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 2--4 260 ± 2 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 2--4 300 ± 2 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 1--10 350 ± 15 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 3--5 525 ± 5 
100 ± 0.5 Ph 111 DSP 32.5 ± 2.5 110 ± 0,50 3--8 450 ± 10 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 2--4 220 ± 2 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 1--3 368 ± 10 
100 ± 0.2mm Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 0.20 - 0.25  380 ± 5 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 2--6 381 ± 6 
100.0 ± 0.5 Ph 111 DSP 32.5 ± 2.5 110 ± 0,50 1--10 350 ± 3 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 10--20 300 ± 10 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 1.4 - 6.0  445 ± 5 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 5--8 300 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 1--3 368 ± 10 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 0.05 - 0.5  525 ± 25 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 3--5 300 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 2--4 400 ± 2 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 10--20 300 ± 10 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 3--5 200 ± 4 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 1--10 500 ± 15 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,25 1--10 300 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 1 - 100  360 ± 10 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 1--10 380 ± 5 
100 ± 0.2 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 1--10 350 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 1--3 280 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 0.05 - 0.5  525 ± 25 
100 ± 0.2 Ph 100 DSP 32.5 ± 2.5 110 ± 0,30 2--10 380 ± 5 
100.0 ± 0.2 Ph 100 DSP 32.5 ± 2.5 110 ± 1 0.04 - 20  400 ± 10 
100 ± 0.2 Ph 100 DSP 32.5 ± 2.5 110 ± 0,30 2--10 300 ± 5 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 3--5 525 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 0.5 - 1.0  485 ± 5 
100 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 0.5 - 1.0  385 ± 5 
100.0 ± 0.5 Ph 100 DSP 32.5 ± 2.5 110 ± 1 10--20 300 ± 10 
100 ± 0.25 N+ Red Ph 100 DSP 32.5 ± 2.5 110 ± 0,20 < 0.0015  250 ± 5 
100 ± 0.25 N+ Red Ph 100 DSP 32.5 ± 2.5 110 ± 0,50 < 0.0015  380 ± 5 
100 ± 0.3 N+ As    111 SSP 32.5 ± 2.5 110 ± 1 < 0.005  381 ± 15 

150mm Silicon Test Grade Wafers

Dia(mm) Type Dopant Ori Pol PFL length PFL direction Res Ohm-cm Thck (µm)
150.0 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,30 0.005 - 0.020  380 ± 5 
150 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 1 0.005-0.02  215-235 
150.0 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 011 ± 0,30 0.005 - 0.020  380 ± 5 
150 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,10 < 0.020  400 ± 10 
150 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  400 ± 15 
150 ± 0.5 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  425 ± 5 
150.0 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,30 0.005 - 0.020  380 ± 5 
150.0 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 011 ± 0,30 0.005 - 0.020  380 ± 5 
150.0±0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,20 0.010-0.020  375-385 
150 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  325 ± 5 
150 ± 0.2 N+ Sb 100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  300 ± 10 
150.0 ± 0.2 N+ As    100 DSP 57.5 ± 2.5 110 ± 1 <0.0035  430 ± 5 
150.0 ± 0.2 N+ As    100 DSP 57.5 ± 2.5 110 ± 1 <0.0035  430 ± 5 
150 ± 0.2mm P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.005 - 0.025  400 ± 10
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1 - 20   400 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 2.55 - 3.45   400 ± 10 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--5 650 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,20 0.017 - 0.022  381 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 1 >1  525 ± 12.5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--5 450 ± 10 
150.0 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.007 - 0.020  400 ± 25 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 < 0,005  625 ± 15  
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 500 ± 25 
150 ± 0.2 B      100 DSP 57.5 ± 0.5 110 ± 0,30 2--10 380 ± 4 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 600 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 0.07 - 0.13  500 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--5 300 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.001 - 0.02  650 ± 5 
150.0 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 1 6 - 8.5  380 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.020 - 0.025  300 ± 7.5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 2.4 - 3.6   400 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 0.5 110 ± 0,30 > 0.3  400 ± 50 
150.0 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 6 - 8.5  380 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--5 400 ± 5 
150.0 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 0.07 - 0.13  380 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.010 - 0.020  1000 ± 5 
150 ± 0.3 B      100 DSP 57.5 ± 2.5 110 ± 0,50 30 - 50  300 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 1 2 - 20   310 ± 10 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.005 - 0.025  290 ± 10 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.005 - 0.025  400 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  525 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 3--5 390 ± 7 
150 ± 0.5 B      100 DSP 57.5 ± 2.0 110 ± 1 5 - 8.5  525 ± 5 
150 ± 0.2 B      100 DSP 47.5 ± 2.5 110 ± 0,50 3--7 385 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--10 400 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--10 600 ± 5 
150 ± 0.5 B      100 DSP 47.5 ± 2.5 110 ± 0,50 70 - 130  1000 ± 10 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1 - 10   400 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,25 1--10 280 ± 1.5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--10 650 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  400 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 100 ± 0,50 5--7 483 ± 5 
150.0 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  380 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 600 ± 5 
150 ± 0.5 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  620 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 1--10 600 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 > 10   625 ± 15 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 1--3 380 ± 12 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  525 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 2.4 - 3.6   400 ± 10 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 2.4 - 3.6   400 ± 10 
150.0 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,20 1--10 675 ± 5 
150 ± 0.3 B      100 DSP 57.5 ± 2.5 110 ± 0,50 30 - 50  300 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  300 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  525 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--10 250 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 283.5 ± 2.5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,20 1--10 650 ± 5 
150 ± 0.5 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.010 - 0.020  500 ± 10 
150 ± 0.5 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.010 - 0.020  500 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 390 ± 5 
150 ± 0.2 B      100 DSP 47.5 ± 2.5 110 ± 0,50 3--7 385 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 435 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 435 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 450 ± 5 
150±0.2mm P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.020 - 0.025  381 -10+5
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.020 - 0.025  300 ± 7.5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 390 ± 5 
150 ± 0.5 B      100 DSP 47.5 ± 2.5 110 ± 1 10 - 50   400 ± 5 
150 ± 0.5 B      100 DSP 47.5 ± 2.5 110 ± 1 10 - 50   455 ± 5 
150 ± 0.5 B      100 DSP 47.5 ± 2.5 110 ± 1 10 - 50   475 ± 5 
150 ± 0.5 B      100 DSP 47.5 ± 2.5 110 ± 0,50 70 - 130  1000 ± 10 
150 ± 0.3 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.010 - 0.050  400 ± 7 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  525 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 5 - 100  380 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 600 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--5 650 ± 10 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 1 1--10 380 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 15 - 25  400 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 390 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 390 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 435 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 15 - 25  525 ± 5 
150.0 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 1 6 - 8.5  380 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 1 5 - 8.5  525 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 5 - 8.5  525 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,20 0.015 - 0.025  800 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 6 - 8.5  380 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 5 - 8.5  525 ± 5 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.007 - 0.020  300 ± 5 
150 ± 0.2 B      100 DSP 47.5 ± 2.5 110 ± 1 1--10 400 ± 20 
150.0 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 1 6 - 8.5  380 ± 10 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,20 0.015 - 0.025  800 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 390 ± 5 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 483 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,10 2.4 - 3.6   400 ± 10 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 385 ± 5 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 2.55 - 3.45   400 ± 10 
150 ± 0.2 B      100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 400 ± 10 
150 ± 0.5 B      100 DSP 57.5 ± 2.5 110 ± 0,50 30-Jan 600 ± 10 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 0,50 0.010 - 0.020  300 ± 10 
150 ± 0.2 P+ B      100 DSP 57.5 ± 2.5 110 ± 1 0.015 - 0.025  800 ± 5 
150 ± 0.5 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1.5 ± 0.5  280 ± 2.5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,20 1--4 375-425 
150 ± 0.5 Ph 100 DSP 47.5 ± 2.5 110 ± 0,50 8--24 525 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1--4 400 ± 10 
150.0 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,20 1--3 400 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,20 1--4 325-375 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 0.5 - 2.0  400 ± 20 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1--25 400 ± 10 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 10--20 450 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 10--20 450 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 3 - 9   300 ± 10 
150 ± 0.5 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1.5 ± 0.5  280 ± 2.5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 2--7 325 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 0.5 - 2.0  400 ± 5 
150 ± 0.5 Ph 100 DSP 47.5 ± 2.5 110 ± 0,50 8--24 525 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 625 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 1.4 - 6.0  390 ± 5 
150 ± 0.5 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 3--5 390 ± 5 
150 Ph 100 DSP 57.5 ± 2.0 110 ± 1 3--7 380 ± 1 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,10 5--7 450 ± 15 
150 ± 0.5 Ph 100 DSP 47.5 ± 2.5 110 ± 0,50 8--24 525 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.0 110 ± 1 3--7 600 ± 5 
150 ± 0.5 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 250 ± 4.5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 0.5 - 2.0  300 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 0.5 - 2.0  300 ± 5 
150 ± 0.2 Ph 100 DSP 47.5 ± 2.5 110 ± 0,50 0.5 - 1.0  495 ± 5 
150 ± 0.2 Ph 110 DSP 57.5 ± 2.5 110 ± 1 4--10 1300 ± 15 
150 ± 0.15 Ph 100 DSP 47.5 ± 2.5 110 ± 1 1--5 550 ± 4 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1--4 250 ± 10 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.0 110 ± 1 3--7 600 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.0 110 ± 1 3--7 380 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 0.675 - 1.125  400 ± 5 
150 ± 0.5 Ph 100 DSP 57.5 ± 2.5 110 ± 1 15  ± 30% 675 ± 20 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 625 ± 5 
150.0 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 1--10 600 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 3--7 625 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,20 1--4 375-425 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,30 1--10 550 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 10--20 450 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,20 3--7 380 ± 5 
150 ± 0.5 Ph 100 DSP 47.5 ± 2.5 110 ± 0,50 8--24 525 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 1--10 400 ± 5 
150 ± 0.2 Ph 100 DSP 57.5 ± 2.5 110 ± 1 10.5 - 19.5  675 ± 20 
150 ± 0.5 Ph 100 DSP 57.5 ± 2.5 110 ± 1 0.5 - 2.0  400 ± 10 
150.0 ± 0.2 N+ Red Ph 100 DSP 57.5 ± 2.5 011 ± 1 0.01 - 0.02  380 ± 10 
150 ± 0.2 N+ Red Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.02  300 ± 5 
150 ± 0.5 N+ Red Ph 100 DSP 47.5 ± 2.5 110 ± 0,20 < 0.0019  400 ± 5 
150 ± 0.5 N+ Red Ph 100 DSP 47.5 ± 2.5 110 ± 0,50 < 0.002  625 ± 5 
150 ± 0.2 N+ Red Ph 100 DSP 57.5 ± 2.5 110 ± 0,50 0.010 - 0.020  400 ± 5 
150 ± 0.5 N+ Red Ph 100 DSP 47.5 ± 2.5 110 ± 0,20 < 0.0019  400 ± 5 
150 ± 0.5mm N+ Sb 100 SSP 47.5 ± 2.5 110 ± 2 0.007 - 0.020  625 ± 25 
150 ± 0.5 P+ B      100 SSP 57.5 ± 2.5 100 ± 1 0.001 - 100  675 ± 200 
150 ± 0.5 B      100 SSP 57.5 ± 2.5 110 ± 0,50 > 0.3  400 ± 50 
150 ± 0.5 P+ B      100 SSP 47.5 ± 2.5 110 ± 1 0.010 - 0.020  508 ± 15 
150 ± 0.2 Ph 111 SSP 57.5 ± 2.5 110 ± 1 4 - 8   650 ± 50 
150 ± 0.2 Ph 111 SSP 57.5 ± 2.5 110 ± 1 0.75 - 5.00   675 ± 25 
150 ± 0.2 Ph 111 SSP 57.5 ± 2.5 110 ± 1 0.75 - 5.00   675 ± 25 
150 ± 0.5 N+ Sb 100 SSP 47.5 ± 2.5 011 ± 1 0.008 - 0.016  550 ± 15 
150 ± 0.5 N+ Sb 100 SSP 47.5 ± 2.5 011 ± 1 0.008 - 0.016  400 ± 15 
150 ± 0.2 N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.005-0.030  1000 ± 20 
150 ± 0.5 N+ Sb 100 SSP 57.5 ± 2.5 110 ± 0,50 0.01 - 0.025  1000 ± 30 
150 ± 0.5 N+ Sb 111 SSP 57.5 ± 2.5 110 ± 1 0.01 - 0.02  625 ± 15 

200mm Silicon Test Grade Wafers

Dia(mm) Type Dopant Ori Pol PFL length PFL direction Res Ohm-cm Thck (µm)
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,50 10 ± 3  725 ± 5 
200 ± 0.2 P+ B      100 DSP 0.0 ± 0.0 110 ± 0,50 0.01 - 0.02  850 ± 5 
200 ± 0.5 P+ B      100 DSP 0.0 ± 0.0 110 ± 0,50 0.01 - 0.02  1000 ± 25 
200 ± 0.5 P+ B      100 DSP 0.0 ± 0.0 110 ± 0,50 0.13 - 0.15  725  ± 10 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,50 30-Jan 720 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 1 2-Jan 725 ± 20 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 1 10 - 100  550 ± 25 
200 ± 0.2 P+ B      100 DSP 0.0 ± 0.0 110 ± 0,50 0.005 - 0.020  710 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 011 ± 1 10 - 200  1500 ± 25 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 1 1--10 650 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,20 1--10 400 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,20 1--10 650 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,50 Jun-36 1000 ± 15 
200 ± 0.5 B      100 DSP 0.0 ± 0.0 110 ± 0,50 May-40 500 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 0,50 30-Jan 720 ± 5 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 1 1--10 1000 ± 25 
200 ± 0.2 B      100 DSP 0.0 ± 0.0 110 ± 1 1--10 725 ± 5 
200 ± 0.2 P+ B      100 DSP 0.0 ± 0.0 110 ± 0,50 0.010 - 0.020  300 ± 5 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 May-40 440 ± 5 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 1--10 725 ± 5 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 1--10 600 ± 10 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 2  - 20  725 ± 15 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 2-Jan 725 ± 20 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 011 ± 1 May-40 440 ± 5 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 011 ± 1 May-40 440 ± 5 
200 ± 0.5 Ph 100 DSP 0.0 ± 0.0 110 ± 1 1--5 650 ± 5 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 0.7 - 5.0  500 ± 10 
200 ± 0.2 Ph 100 DSP 0.0 ± 0.0 110 ± 1 Jan-50 725 ± 20
200 ± 0.2 N+ Red Ph 100 DSP 0.0 ± 0.0 110 ± 1 0.001 - 0.002  725 ± 25 
200 ± 0.2mm N+ Red Ph 100 DSP 0.0 ± 0.0 110 ± 1 0.010 - 0.020  500 ± 10 
200 ± 0.2 N+ Red Ph 100 DSP 0.0 ± 0.0 110 ± 1 0.001 - 0.002  725 ± 25 
200 ± 0.2 N+ Red Ph 100 DSP 0.0 ± 0.0 110 ± 1 < 0.0015  725 ± 15 
200 ± 0.2 B      100 SSP 0.0 ± 0.0 110 ± 1 Jan-50 725 ± 25 
199.8-200.2mm N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.007-0.02  710-740 
199.8-200.2mm N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.007-0.02  710-740 
199.8-200.2mm N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.007-0.02  710-740 
200 ± 0.2 N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.008 - 0.020  725 ± 15 
200 ± 0.2 N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.005 - 0.020  725 ± 10 
200 ± 0.2 N+ Sb 100 SSP 0.0 ± 0.0 011 ± 1 0.005 - 0.020  725 ± 15 
199.8-200.2mm N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.007-0.02  710-740 
200 ± 0.2 N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.008 - 0.020  725 ± 15 
200 ± 0.2 N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.01 - 0.02  500  ± 5 
199.8-200.2 N+ Sb 100 SSP 0.0 ± 0.0 110 ± 1 0.007-0.02  710-740 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 110 ± 0,50 0.003-0.006  675 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 100 ± 1 0.002-0.003  725 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 100 ± 1 0.001 - 0.003  725 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 100 ± 1 0.002-0.003  725 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 010 ± 1 < 3 m 725 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 010 ± 1 < 3 m 725 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 110 ± 1 1 - 4 m 725 ± 15 
200 ± 0.2 N+ As    111 SSP 0.0 ± 0.0 110 ± 1 1 - 4 m 725 ± 15 
200 ± 0.2 N+ As    100 SSP 0.0 ± 0.0 100 ± 1 0.0022-0.003  725 ± 15