Test Grade Silicon Wafers for Research and Production

Are Test Grade Silicon Wafers Good for My Research?

A scientist asked us the following:

I have questions about the quality of Si wafers. So we want wafers that will help us determine dep rate, unif, etc. but only need quality good enough to accurately measure results repeatably. I am assuming TEST wafers good enough for that?

See below for the answer!

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Test Grade Wafer Answer

A scientist asked us the following:

I have questions about the quality of Si wafers. So we want wafers that will help us determine dep rate, unif, etc. but only need quality good enough to accurately measure results repeatably. I am assuming TEST wafers good enough for that?

These would be run using a variety of processes, from sputtering, to PECVD, etc. Why would someone need to get PRIME grade silicon?

Also, we are going to use a number of wafers for dummies in a LCPVD process, where they will be going in and out of the chamber for a number of runs. For that, should we be using TEST wafers? Or MECHANICAL grade good enough there? In the dummy case, no measurements will be done on the wafers. They will just get thicker and thicker coatings over time, until they get replaced. Please advise

A couple of different things we are using the wafers for.

1 . we need some for verifying Dep Rates and RI of films on Si. So the quality there needs to be good enough for that. So is TEST wafer sufficient, or do we need PRIME for that? If so, why?

2. We need dummy wafers to put into LPCVD tool to take up spare slots during deposition. We won't do any measurements on these, and they will go in multiple times, maybe for up to 6 months so long they are not flaking. Are MECH grade wafers good enough for that, or will they flake more quickly than TEST wafers. If so, why?

If you can answer these questions for us, we will place an order for 2 different types of Si wafers.

UniversityWafer, Inc. Replied:

SEMI standards are the specifications covering the physical and chemical characteristics of Silicon wafers.

SEMI defines Prime and Test grades of wafers. According to SEMI, the two grades are the same, except that Test wafers are allowed to have some polishing imperfections, most notably scratches and surface dust particles. Chemically they are the same. Test grade was established for the very purpose that you plan to use the wafers, that is to be the monitor wafers for doping and film deposition processes.

In common usage, Test grade wafers are those that have any polishing imperfections or those that have been on the shelf for a long time. Old wafers have an extra thick layer of "native oxide" that forms over time and shows up as "haze" during inspection. One needs to check into the nature of the imperfections to make sure that they do not affect deposition rates in LPCVD or PECVD reactors and Refractive index measurements. In most cases commonly named Test grade wafers are entirely adequate as monitor wafers.

In common usage, Mechanical grade wafers can have any crystallographic orientation and any kind and degree of doping, as long as they conform to geometric specifications. One needs to check if the dopants or dust particles on such wafers can contaminate the process. For example, Arsenic can easily evaporate from such wafers when they are heated in vacuum. In most cases commonly named Mechanical grade wafers are adequate as spacer wafers.

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We have a large selection of test grade silicon wafers

P-type, N-type, Undoped all in stock.

Below is just a short list of the test grade silicon substrates that we have in stock!

100mm Silicon Test Grade Wafers

Dia(mm)	Typ	Dop	Ori	Pol	PFL length	PFL direction	Res Ohm-cm	Thck (µm)
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	340 ± 10
100 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,20	0.010 - 0.025	300 ± 5
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.010 - 0.022	310 ± 5
100 ± 0.2	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.005 - 0.020	300 ± 2.5
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.008 - 0.022	400 ± 10
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.01 - 0.03	600 ± 15
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.01 - 0.02	420 ± 5
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.01 - 0.02	520 ± 5
100 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,20	0.010 - 0.025	315 ± 5
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.01 - 0.02	420 ± 5
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	380 ± 10
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	355 ± 10
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	500 ± 10
100 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,20	0.010 - 0.025	300 ± 5
100 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.005 - 0.020	525 ± 25
100 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.005 - 0.020	525 ± 25
100 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 0,50	0.010 - 0.025	315 ± 3
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	380 ± 10
100 ± 0.2	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.005 - 0.020	300 ± 2.5
100.0 ± 0.5	N+	Sb	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	380 ± 10
100 ± 0.5	N+	As	100	DSP	32.5 ± 2.5	110 ± 0,50	0.001 - 0.005	380 ± 10
100.0 ± 0.3	P+	B	100	DSP	32.5 ± 2.5	110 ± 0,50	0.01 - 0.020	327 ± 5
100.0 ± 0.3	P+	B	100	DSP	32.5 ± 2.5	110 ± 1	0.015 - 0.020	381 ± 7
100 ± 0.5	P+	B	100	DSP	32.5 ± 2.5	110 ± 0,50	0.01 - 0.02	525 ± 25
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 1	0.5 - 10	318 ± 12.7
100 ± 0.15	P	B	110	DSP	32.5 ± 2.5	111 ± 0,10	5--10	200 ± 15
100 ± 0.5	P+	B	100	DSP	32.5 ± 2.5	110 ± 1	0.010 - 0.020	200 ± 10
100 ± 0.38	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	0.5 - 10	889 ± 12.7
100.0 ± 0.2	P	B	100	DSP	32.5 ± 2.5	110 ± 1	0.1 - 0.5	380 ± 5
100 ± 0.38	P	B	100	DSP	32.5 ± 2.5	110 ± 1	0.5 - 10	508 ± 12.7
100 ± 0.5	P	B	111	DSP	32.5 ± 2.5	110 ± 1	10--20	525 ± 25
100.0 ± 0.2	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	8--10	225 ± 10
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 1	3--5	350 ± 10
100 ± 0.3	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	1--5	225 ± 5
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 1	1--20	350 ± 15
100 ± 0.2	P+	B	100	DSP	32.5 ± 2.5	110 ± 0,30	< 0.020	300 ± 15
100 ± 0.38	P	B	100	DSP	32.5 ± 2.5	110 ± 1	0.5 - 10	318 ± 12.7
100 ± 0.5	P+	B	111	DSP	32.5 ± 2.5	110 ± 1	0.0034 - 0.004	450 ± 5
100 ± 0.15	P	B	110	DSP	32.5 ± 2.5	111 ± 0,10	> 1	381 ± 15
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	1--10	280 ± 10
100 ± 0.2	P	B	100	DSP	32.5 ± 2.5	110 ± 0,20	1--10	490 ± 5
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	5--10	525 ± 5
100 ± 0.5	P	B	110	DSP	32.5 ± 2.5	111 ± 0,20	5--10	380 ± 5
100.0 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 1	5--7	483 ± 25
100 ± 0.2	P	B	100	DSP	32.5 ± 2.5	110 ± 0,20	2--4	280 ± 5
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	3--7	300 ± 5
100 ± 0.3	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	1--5	390 ± 10
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	3--7	385 ± 5
100 ± 0.2	P	B	100	DSP	32.5 ± 2.5	110 ± 0,20	1--10	490 ± 20
100.0 ± 0.3	P+	B	100	DSP	32.5 ± 2.5	110 ± 1	0.015 - 0.020	381 ± 7
100 ± 0.3	P	B	100	DSP	32.5 ± 2.5	110 ± 1	1 - 100	202 ± 4
100 ± 0.3	P	B	100	DSP	32.5 ± 2.5	110 ± 1	1 - 100	302 ± 4
100 ± 0.5	P	B	100	DSP	32.5 ± 2.5	110 ± 0,50	3--7	385 ± 5
100 ± 0.2	P+	B	100	DSP	32.5 ± 2.5	110 ± 0,50	0.010 - 0.025	500 ± 25
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	0.5 - 1.0	385 ± 5
100.0 ± 0.5	N	Ph	111	DSP	32.5 ± 2.5	110 ± 0,20	1--10	300 ± 3
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	2--4	260 ± 2
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	2--4	300 ± 2
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	1--10	350 ± 15
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	3--5	525 ± 5
100 ± 0.5	N	Ph	111	DSP	32.5 ± 2.5	110 ± 0,50	3--8	450 ± 10
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	2--4	220 ± 2
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	1--3	368 ± 10
100 ± 0.2mm	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	0.20 - 0.25	380 ± 5
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	2--6	381 ± 6
100.0 ± 0.5	N	Ph	111	DSP	32.5 ± 2.5	110 ± 0,50	1--10	350 ± 3
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	10--20	300 ± 10
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	1.4 - 6.0	445 ± 5
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	5--8	300 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	1--3	368 ± 10
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	0.05 - 0.5	525 ± 25
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	3--5	300 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	2--4	400 ± 2
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	10--20	300 ± 10
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	3--5	200 ± 4
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	1--10	500 ± 15
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,25	1--10	300 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	1 - 100	360 ± 10
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	1--10	380 ± 5
100 ± 0.2	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	1--10	350 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	1--3	280 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	0.05 - 0.5	525 ± 25
100 ± 0.2	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,30	2--10	380 ± 5
100.0 ± 0.2	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	0.04 - 20	400 ± 10
100 ± 0.2	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,30	2--10	300 ± 5
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	3--5	525 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	0.5 - 1.0	485 ± 5
100 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	0.5 - 1.0	385 ± 5
100.0 ± 0.5	N	Ph	100	DSP	32.5 ± 2.5	110 ± 1	10--20	300 ± 10
100 ± 0.25	N+	Red Ph	100	DSP	32.5 ± 2.5	110 ± 0,20	< 0.0015	250 ± 5
100 ± 0.25	N+	Red Ph	100	DSP	32.5 ± 2.5	110 ± 0,50	< 0.0015	380 ± 5
100 ± 0.3	N+	As	111	SSP	32.5 ± 2.5	110 ± 1	< 0.005	381 ± 15

150mm Silicon Test Grade Wafers

Dia(mm)	Type	Dopant	Ori	Pol	PFL length	PFL direction	Res Ohm-cm	Thck (µm)
150.0 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,30	0.005 - 0.020	380 ± 5
150 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 1	0.005-0.02	215-235
150.0 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	011 ± 0,30	0.005 - 0.020	380 ± 5
150 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,10	< 0.020	400 ± 10
150 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	400 ± 15
150 ± 0.5	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	425 ± 5
150.0 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,30	0.005 - 0.020	380 ± 5
150.0 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	011 ± 0,30	0.005 - 0.020	380 ± 5
150.0±0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,20	0.010-0.020	375-385
150 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	325 ± 5
150 ± 0.2	N+	Sb	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	300 ± 10
150.0 ± 0.2	N+	As	100	DSP	57.5 ± 2.5	110 ± 1	<0.0035	430 ± 5
150.0 ± 0.2	N+	As	100	DSP	57.5 ± 2.5	110 ± 1	<0.0035	430 ± 5
150 ± 0.2mm	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.005 - 0.025	400 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1 - 20	400 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	2.55 - 3.45	400 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--5	650 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,20	0.017 - 0.022	381 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 1	>1	525 ± 12.5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--5	450 ± 10
150.0 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.007 - 0.020	400 ± 25
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	< 0,005	625 ± 15
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	500 ± 25
150 ± 0.2	P	B	100	DSP	57.5 ± 0.5	110 ± 0,30	2--10	380 ± 4
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	600 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	0.07 - 0.13	500 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--5	300 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.001 - 0.02	650 ± 5
150.0 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 1	6 - 8.5	380 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.020 - 0.025	300 ± 7.5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	2.4 - 3.6	400 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 0.5	110 ± 0,30	> 0.3	400 ± 50
150.0 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	6 - 8.5	380 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--5	400 ± 5
150.0 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	0.07 - 0.13	380 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.010 - 0.020	1000 ± 5
150 ± 0.3	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	30 - 50	300 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 1	2 - 20	310 ± 10
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.005 - 0.025	290 ± 10
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.005 - 0.025	400 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	525 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	3--5	390 ± 7
150 ± 0.5	P	B	100	DSP	57.5 ± 2.0	110 ± 1	5 - 8.5	525 ± 5
150 ± 0.2	P	B	100	DSP	47.5 ± 2.5	110 ± 0,50	3--7	385 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--10	400 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--10	600 ± 5
150 ± 0.5	P	B	100	DSP	47.5 ± 2.5	110 ± 0,50	70 - 130	1000 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1 - 10	400 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,25	1--10	280 ± 1.5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--10	650 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	400 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	100 ± 0,50	5--7	483 ± 5
150.0 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	380 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	600 ± 5
150 ± 0.5	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	620 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	1--10	600 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	> 10	625 ± 15
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	1--3	380 ± 12
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	525 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	2.4 - 3.6	400 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	2.4 - 3.6	400 ± 10
150.0 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,20	1--10	675 ± 5
150 ± 0.3	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	30 - 50	300 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	300 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	525 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--10	250 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	283.5 ± 2.5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,20	1--10	650 ± 5
150 ± 0.5	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.010 - 0.020	500 ± 10
150 ± 0.5	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.010 - 0.020	500 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	390 ± 5
150 ± 0.2	P	B	100	DSP	47.5 ± 2.5	110 ± 0,50	3--7	385 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	435 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	435 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	450 ± 5
150±0.2mm	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.020 - 0.025	381 -10+5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.020 - 0.025	300 ± 7.5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	390 ± 5
150 ± 0.5	P	B	100	DSP	47.5 ± 2.5	110 ± 1	10 - 50	400 ± 5
150 ± 0.5	P	B	100	DSP	47.5 ± 2.5	110 ± 1	10 - 50	455 ± 5
150 ± 0.5	P	B	100	DSP	47.5 ± 2.5	110 ± 1	10 - 50	475 ± 5
150 ± 0.5	P	B	100	DSP	47.5 ± 2.5	110 ± 0,50	70 - 130	1000 ± 10
150 ± 0.3	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.010 - 0.050	400 ± 7
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	525 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	5 - 100	380 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	600 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--5	650 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 1	1--10	380 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	15 - 25	400 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	390 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	390 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	435 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	15 - 25	525 ± 5
150.0 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 1	6 - 8.5	380 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 1	5 - 8.5	525 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	5 - 8.5	525 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,20	0.015 - 0.025	800 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	6 - 8.5	380 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	5 - 8.5	525 ± 5
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.007 - 0.020	300 ± 5
150 ± 0.2	P	B	100	DSP	47.5 ± 2.5	110 ± 1	1--10	400 ± 20
150.0 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 1	6 - 8.5	380 ± 10
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,20	0.015 - 0.025	800 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	390 ± 5
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	483 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,10	2.4 - 3.6	400 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	385 ± 5
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	2.55 - 3.45	400 ± 10
150 ± 0.2	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	400 ± 10
150 ± 0.5	P	B	100	DSP	57.5 ± 2.5	110 ± 0,50	30-Jan	600 ± 10
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 0,50	0.010 - 0.020	300 ± 10
150 ± 0.2	P+	B	100	DSP	57.5 ± 2.5	110 ± 1	0.015 - 0.025	800 ± 5
150 ± 0.5	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1.5 ± 0.5	280 ± 2.5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,20	1--4	375-425
150 ± 0.5	N	Ph	100	DSP	47.5 ± 2.5	110 ± 0,50	8--24	525 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1--4	400 ± 10
150.0 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,20	1--3	400 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,20	1--4	325-375
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	0.5 - 2.0	400 ± 20
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1--25	400 ± 10
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	10--20	450 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	10--20	450 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	3 - 9	300 ± 10
150 ± 0.5	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1.5 ± 0.5	280 ± 2.5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	2--7	325 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	0.5 - 2.0	400 ± 5
150 ± 0.5	N	Ph	100	DSP	47.5 ± 2.5	110 ± 0,50	8--24	525 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	625 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	1.4 - 6.0	390 ± 5
150 ± 0.5	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	3--5	390 ± 5
150	N	Ph	100	DSP	57.5 ± 2.0	110 ± 1	3--7	380 ± 1
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,10	5--7	450 ± 15
150 ± 0.5	N	Ph	100	DSP	47.5 ± 2.5	110 ± 0,50	8--24	525 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.0	110 ± 1	3--7	600 ± 5
150 ± 0.5	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	250 ± 4.5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	0.5 - 2.0	300 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	0.5 - 2.0	300 ± 5
150 ± 0.2	N	Ph	100	DSP	47.5 ± 2.5	110 ± 0,50	0.5 - 1.0	495 ± 5
150 ± 0.2	N	Ph	110	DSP	57.5 ± 2.5	110 ± 1	4--10	1300 ± 15
150 ± 0.15	N	Ph	100	DSP	47.5 ± 2.5	110 ± 1	1--5	550 ± 4
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1--4	250 ± 10
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.0	110 ± 1	3--7	600 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.0	110 ± 1	3--7	380 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	0.675 - 1.125	400 ± 5
150 ± 0.5	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	15  ± 30%	675 ± 20
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	625 ± 5
150.0 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	1--10	600 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	3--7	625 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,20	1--4	375-425
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,30	1--10	550 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	10--20	450 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,20	3--7	380 ± 5
150 ± 0.5	N	Ph	100	DSP	47.5 ± 2.5	110 ± 0,50	8--24	525 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	1--10	400 ± 5
150 ± 0.2	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	10.5 - 19.5	675 ± 20
150 ± 0.5	N	Ph	100	DSP	57.5 ± 2.5	110 ± 1	0.5 - 2.0	400 ± 10
150.0 ± 0.2	N+	Red Ph	100	DSP	57.5 ± 2.5	011 ± 1	0.01 - 0.02	380 ± 10
150 ± 0.2	N+	Red Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.02	300 ± 5
150 ± 0.5	N+	Red Ph	100	DSP	47.5 ± 2.5	110 ± 0,20	< 0.0019	400 ± 5
150 ± 0.5	N+	Red Ph	100	DSP	47.5 ± 2.5	110 ± 0,50	< 0.002	625 ± 5
150 ± 0.2	N+	Red Ph	100	DSP	57.5 ± 2.5	110 ± 0,50	0.010 - 0.020	400 ± 5
150 ± 0.5	N+	Red Ph	100	DSP	47.5 ± 2.5	110 ± 0,20	< 0.0019	400 ± 5
150 ± 0.5mm	N+	Sb	100	SSP	47.5 ± 2.5	110 ± 2	0.007 - 0.020	625 ± 25
150 ± 0.5	P+	B	100	SSP	57.5 ± 2.5	100 ± 1	0.001 - 100	675 ± 200
150 ± 0.5	P	B	100	SSP	57.5 ± 2.5	110 ± 0,50	> 0.3	400 ± 50
150 ± 0.5	P+	B	100	SSP	47.5 ± 2.5	110 ± 1	0.010 - 0.020	508 ± 15
150 ± 0.2	N	Ph	111	SSP	57.5 ± 2.5	110 ± 1	4 - 8	650 ± 50
150 ± 0.2	N	Ph	111	SSP	57.5 ± 2.5	110 ± 1	0.75 - 5.00	675 ± 25
150 ± 0.2	N	Ph	111	SSP	57.5 ± 2.5	110 ± 1	0.75 - 5.00	675 ± 25
150 ± 0.5	N+	Sb	100	SSP	47.5 ± 2.5	011 ± 1	0.008 - 0.016	550 ± 15
150 ± 0.5	N+	Sb	100	SSP	47.5 ± 2.5	011 ± 1	0.008 - 0.016	400 ± 15
150 ± 0.2	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.005-0.030	1000 ± 20
150 ± 0.5	N+	Sb	100	SSP	57.5 ± 2.5	110 ± 0,50	0.01 - 0.025	1000 ± 30
150 ± 0.5	N+	Sb	111	SSP	57.5 ± 2.5	110 ± 1	0.01 - 0.02	625 ± 15

200mm Silicon Test Grade Wafers

Dia(mm)	Type	Dopant	Ori	Pol	PFL length	PFL direction	Res Ohm-cm	Thck (µm)
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,50	10 ± 3	725 ± 5
200 ± 0.2	P+	B	100	DSP	0.0 ± 0.0	110 ± 0,50	0.01 - 0.02	850 ± 5
200 ± 0.5	P+	B	100	DSP	0.0 ± 0.0	110 ± 0,50	0.01 - 0.02	1000 ± 25
200 ± 0.5	P+	B	100	DSP	0.0 ± 0.0	110 ± 0,50	0.13 - 0.15	725  ± 10
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,50	30-Jan	720 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 1	2-Jan	725 ± 20
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 1	10 - 100	550 ± 25
200 ± 0.2	P+	B	100	DSP	0.0 ± 0.0	110 ± 0,50	0.005 - 0.020	710 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	011 ± 1	10 - 200	1500 ± 25
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 1	1--10	650 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,20	1--10	400 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,20	1--10	650 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,50	Jun-36	1000 ± 15
200 ± 0.5	P	B	100	DSP	0.0 ± 0.0	110 ± 0,50	May-40	500 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 0,50	30-Jan	720 ± 5
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 1	1--10	1000 ± 25
200 ± 0.2	P	B	100	DSP	0.0 ± 0.0	110 ± 1	1--10	725 ± 5
200 ± 0.2	P+	B	100	DSP	0.0 ± 0.0	110 ± 0,50	0.010 - 0.020	300 ± 5
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	May-40	440 ± 5
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	1--10	725 ± 5
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	1--10	600 ± 10
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	2  - 20	725 ± 15
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	2-Jan	725 ± 20
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	011 ± 1	May-40	440 ± 5
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	011 ± 1	May-40	440 ± 5
200 ± 0.5	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	1--5	650 ± 5
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	0.7 - 5.0	500 ± 10
200 ± 0.2	N	Ph	100	DSP	0.0 ± 0.0	110 ± 1	Jan-50	725 ± 20
200 ± 0.2	N+	Red Ph	100	DSP	0.0 ± 0.0	110 ± 1	0.001 - 0.002	725 ± 25
200 ± 0.2mm	N+	Red Ph	100	DSP	0.0 ± 0.0	110 ± 1	0.010 - 0.020	500 ± 10
200 ± 0.2	N+	Red Ph	100	DSP	0.0 ± 0.0	110 ± 1	0.001 - 0.002	725 ± 25
200 ± 0.2	N+	Red Ph	100	DSP	0.0 ± 0.0	110 ± 1	< 0.0015	725 ± 15
200 ± 0.2	P	B	100	SSP	0.0 ± 0.0	110 ± 1	Jan-50	725 ± 25
199.8-200.2mm	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.007-0.02	710-740
199.8-200.2mm	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.007-0.02	710-740
199.8-200.2mm	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.007-0.02	710-740
200 ± 0.2	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.008 - 0.020	725 ± 15
200 ± 0.2	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.005 - 0.020	725 ± 10
200 ± 0.2	N+	Sb	100	SSP	0.0 ± 0.0	011 ± 1	0.005 - 0.020	725 ± 15
199.8-200.2mm	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.007-0.02	710-740
200 ± 0.2	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.008 - 0.020	725 ± 15
200 ± 0.2	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.01 - 0.02	500  ± 5
199.8-200.2	N+	Sb	100	SSP	0.0 ± 0.0	110 ± 1	0.007-0.02	710-740
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	110 ± 0,50	0.003-0.006	675 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	100 ± 1	0.002-0.003	725 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	100 ± 1	0.001 - 0.003	725 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	100 ± 1	0.002-0.003	725 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	010 ± 1	< 3 m	725 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	010 ± 1	< 3 m	725 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	110 ± 1	1 - 4 m	725 ± 15
200 ± 0.2	N+	As	111	SSP	0.0 ± 0.0	110 ± 1	1 - 4 m	725 ± 15
200 ± 0.2	N+	As	100	SSP	0.0 ± 0.0	100 ± 1	0.0022-0.003	725 ± 15