Low Stress Nitride on Silicon Wafers

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Low Stress Nitride Silicon Wafers

Why use low stress nitride on your silicon wafers? Some uses include surface micromachining process that can fabricate the micromechanical structures when internal tensile stress and native nonporous morphology is required.

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Super Low Stress Silicon Nitride Wafers

This paper focuses on low stress silicon nitride films (LS - SiN) and investigates the effects of high temperature and low voltage deposition conditions on the characterization of residual stresses reported in this paper. The experiments were conducted to investigate the effect of the deposition of polysilicon (silicon nitrite) under a variety of process conditions. For example, residual stresses vary considerably between the different deposition conditions. At these two temperatures, the tension is always tensile, but at 850C we observe a significant increase in the residual pressure (RI) of the film. We found that the RI increases with temperature, with an increase of up to 1,000 degrees Celsius (2,500 degrees F), and we found an increased RI of 3,200 degrees C (4,600 degrees F). [Sources: 0, 2]

The emerging semiconductor devices with large band gaps, such as those built from the SiN system, are significant because they have the potential to revolutionize the power electronics industry. As MEMS devices become smaller, a reduced residual voltage level will improve the performance and reliability of the devices. The high-temperature return loosens the load and causes the material to settle at the grain boundary, where defects and voids occur at the grain boundaries and cause a return flow. [Sources: 2, 3]

The main objective of this invention is to create the ability to produce a silicon membrane by using a selective doping scheme to define a low stress structure. The aim of the invention was to provide a method for producing high-temperature reflux silicon nitride wafers and manufactured silicon diodes with controlled thickness and low voltage. [Sources: 5]

In the plasma deposition of silicon nitride, the hydrogen is simply integrated into the silicon wafer and a thin layer is formed without tensile stress. The wafers are then etched to a nitride membrane, which serves as a supporting membrane to increase its rigidity. [Sources: 1, 5]

In this experiment, the residual stress of the polysilicon is closely related to the membrane, which is stoichiometric and not low loaded. This microstructure is highly dependent on the deposition conditions, but since the stress is so low, it does not matter. [Sources: 2, 7]

The silicon membrane thickness is 28 micrometers, which makes it possible to integrate an integrated circuit on a wafer. The resulting thickness is difficult to control and it is not easy to dilute the entire wafer by 5 - 10 microns. The stress of the deposited layer is caused by stacking errors in the crystal structure and needle holes. [Sources: 1, 5]

This method also affects residual stress and is not a good choice if a higher thickness is required for a particular application. For this application, the thin film used must be stress-free or stress-compensated. The work will be presented at the annual meeting of the American Society of Materials Science and Engineering (ASSE) in San Francisco. [Sources: 0, 2]

WO 00 - 70630) shows a powerful MEMS electret Microphone with a layer of extremely low-load silicon nitride wafers (ST). Microphone microphone describes a method of making a microphone from epitaxial silicon substrates without forming holes. The membrane itself is a low-stress ST - silicon - nitrite, in contrast to the stoichiometric ST - nitride layer, which originates from an earlier technology window in which significant stresses occur. Remember that pressure is applied to push the membrane against the silicon substrate (e.g. peel off). [Sources: 4, 5]

The tensions are inherently tensile, since the kinetic energy of the silicon atoms is low and causes nucleation at small fine grain boundaries. [Sources: 2]

The type of deposited film is either amorphous or crystalline, and the deposition rate is slow - beeswax, but the tensile stress values are significantly lower. This often leads to stress in the compression film at deposit temperatures, which cannot be explained by a relaxation of tension alone. The weak binding force of the carrier material on the film causes very little stress than the tensile stresses. If we reverse the flow ratio to 10: 1, the silicon-rich nitride layers are deposited at a very low flow rate of 1: 10,000, which affects the residual voltage shown in Figures 8 and 9 [15-19]. [Sources: 0, 2]

The values of n-2 in wafer # 01 are consistent with the data already mentioned in the literature on silicon nitride waveguides 30,31. [Sources: 6]

A three-dimensional structure whose functionality typically requires functionality that should be freed from the planar substrate. The film pattern on the surface of the micromachining process has proven to be a high quality image of a silicon nitride waveguide with a thickness of less than 1 mm. Originally used in integrated circuits, films made of thin layers of silicon oxide and a thin layer of copper oxide were deposited or removed and deposited on silicon wafers. In the LPCVD system, the thin layer on the side of each silicon wafer is deposited, and etching this layer on the back requires extremely low pressure, high temperatures and low pressure. This provides a new approach to manufacturing silicon baking plates for a wide range of applications, such as microfluidic devices and microelectronics. [Sources: 0, 2, 5]

Sources:

[0]: https://www.hindawi.com/journals/amse/2013/835942/


[2]: https://www.hindawi.com/journals/jma/2014/954618/

[3]: https://jsmimmobilier.ma/kq1zq/semiconductor-device-simulation.html

[4]: https://www.2spi.com/item/4128sn-ba/

[5]: https://patents.google.com/patent/US20040253760A1/en

[6]: https://www.nature.com/articles/s41598-017-00062-6

 

SPECIFICATIONS

  • Thickness range: 50Å – 2µm
  • Thickness tolerance: +/-5%
  • Within wafer uniformity: +/-5% or better
  • Wafer to wafer uniformity: +/-5% or better
  • Sides processed: both
  • Refractive index: 2.20 +/-.02
  • Film stress: <250MPa Tensile Stress
  • Wafer size: 50mm, 100mm, 125mm, 150mm, 200mm
  • Wafer thickness: 100µm – 2,000µm
  • Wafer material: Silicon, Silicon on Insulator, Quartz
  • Temperature: 820C°
  • Gases: Dichlorosilane, Ammonia
  • Equipment: Horizontal vacuum furnace