Silicon Wafers with JEIDA Flats

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How are JEIDA Flats Different from SEMI Standard Flats?

JEIDA flats are 10mm smaller repectively than SEMI standards flats.

What is a Jeida Flat?

Jeida sounds like a Star Wars character, but it's not. Jeida flats are the Japanese standards leng of edges cut out of round flats.

The rest of the world uses Semiconductor Standard Flats.

Wafer Dimension Specification   SEMI and JEIDA  
DIAMETER Dimension

Tolerance
SEMI
JEIDA
50.80
50.00
60.00 76.20
76.00
80.00 90.00
90.00
100.00
100.00
125.00
125.00
150.00
150.00
200.00
200.00
SEMI
JEIDA
0.38
0.5
0.5 0.63
0.5
0.5 0.5
0.5
0.5
0.5
0.2
0.5
0.2
0.5
0.2
0.5
THICKNESS Dimension

Tolerance
SEMI
JEIDA
0.279
0.280
0.330 0.381
0.380
0.400 0.475
0.475
0.52
0.525
0.625 0.625
0.625
0.675
0.625
0.725
0.725
SEMI
JEIDA
0.025
0.010
0.015 0.025
0.015
0.025 0.025
0.025
0.020
0.015
0.020
0.015
0.020
0.015
0.020
0.025
PRIMARY FLAT LENGTH Dimension

Tolerance
SEMI
JEIDA
15.88
17.50
20.00 22.22
22.00
22.00 27.00
27.00
32.50
32.50
42.50
42.50
57.50
47.50
57.50
57.50
SEMI
JEIDA
1.65
2.50
2.50 3.17
2.50
3.00 3.00
2.50
2.50
2.50
2.50
2.50
2.50
2.50
2.50
2.50
SECONDARY FLAT LENGTH Dimension

Tolerance
SEMI
JEIDA
8.00
-

11.18
-
11.50
-
13.50
-
18.00
-
27.50
-
37.50
-
NO 2nd flat
-
SEMI
JEIDA
1.65
-

1.52
-
1.50
-
1.50
-
2.00
-
2.50
-
2.50
-
-
-
BOW MAX Dimension SEMI
JEIDA
0.038
0.040 0.040 0.040 0.040 0.040 0.060 0.065
TOTAL THICKNESS VARIATION Dimension SEMI
JEIDA
0.012
0.015
0.020 0.025
0.025
0.025 0.025
0.025
0.010
0.025
0.010
0.025
0.010
0.025
0.010
0.025
EDGE PROFILE COODINATE;Cy Dimension SEMI
JEIDA
0.093
0.127 0.133 0.158 0.175 0.208 0.208 0.225 0.242