What Silicon Wafers Are Used for Scanning Electron Microscopy (SEM)?

university wafer substrates

Silicon Wafers Used for SEM

Researchers have used the following test grade silicon wafers for their Scanning Electron Microscopy studies.


We are using the silicon wafers as conducting substrate for cross sectional scanning electron microscopy. The specs would be conductive and polished surface on one side.

Si Item #452 (Buy online and save!)

100mm P(100) 0-100 ohm-cm SSP 500um

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What Does Scanning Electron Microscopy (SEM) Look Like?


I need the patterned Si Substrate. Herewith I attached one SEM image of such patterned Si wafer. Please let me know if you are able to supply such substrates. If you confirm then I will inform you size and number of wafers etc.

scanning electron microscopy of patterned silicon wafers

Silicon Wafers Used for Cross-Sectional SEM Imaging of a Polymer Film


I am inquiring about your metal sputtering/evaporation capabilities and pricing. We are looking for wafers with a thin film of Cr that we can still cleave for cross-sectional SEM imaging of a polymer film that will be deposited on the surface. I am wondering about the capabilities of your coating processes (i.e. how thin of a film) and the costs of such processes. For our purposes, the underlying wafer wouldnt matter so long is it is 100 or 150 mm in diameter and the surface is well conductive and cleavable.

UniversityWafer, Inc. Quoted:

Silicon Wafer
Diameter: 100mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1-50 ohm-cm
Thickness: 525 +/-25 microns
Front Surface: Polished
Back Surface: Etched
Coated with 1-100 nm of Chromium, Cr (99.95%) fresh upon order. Please specify desired Cr thickness

Contact us for pricing. Reference #250281

What is Scanning Electron Microscopy (SEM)? And What Wafers Should I Use?

A scientist was looking for the following: Highly-Doped Silicon, P or N, no preference, The more doped, the better No preference in orientation Lowest resistivity Wafer thickness not critical DSP, highest grade polish
These wafers will be used to deposit ceramics, so the surface properties are more critical than the semiconductor properties. We aim for a low-resistivity silicon to enable Scanning electron microscopy. Exact size is not so relevant as our sample holder is a rectangular shape, we'll have to cut it anyway.

If you have Gold or Platinum deposited on 1 or 2 sides of the wafer, it would be best, but we can otherwise deposit it ourselves.

UniversityWafer, Inc. Replied and Quoted:

We can supply the required materials in the form of wafers and we can also arrange to have them diced into 10×8mm chips. However, you have to specify how many wafers and/or Chips do you require. Unit price depends on the quantity ordered.

When you ask for Silicon Oxide wafers, what do you mean by that? - Here are some choices:
- Monocrystalline Quartz (SiO2) - this is the highest purity material - you must specify the crystallographic orientation (thermal expansion coefficient depends on crystal orientation)
- Fused Silica or Fused quartz (SiO2) - this comes in several grades differing primarily in light transmission at the far UV and IR wavelengths - Silicon wafers with Thermal Oxide layer (SiO2) on the surface, anywhere from 0.1 to 2.4µm thick (the Silicon wafer itself would be 300 to 1,000µm thick)
I would guess that Silicon wafer with Thermal Oxide layer is what you want for your ceramics research.

We can supply wafers with Platinum or Gold layer sputtered on them. You need to specify the thickness of Pt or Au layers (Pt & Au areexpensive).

Highly doped Silicon wafers have resistivity in the range (0.001-0.005)Ohmcm,
p-type would be Boron doped Si:B and n-type would be Arsenic doped, Si:As.

Item Material Orient. Diam. Thick (μm) Surf. Res Ωcm Comment
F863 P/B [100] 4" 525 DSP 0.001-0.005 SEMI Prime, 1Flat, Empak cst, TTV<5μm, Free of striation marks
I135 P/B [100] 4" 500 DSP 0.001-0.005 SEMI Prime, 2Flats, Empak cst, Wafers with striation marks
TS016 P/B [111] ±1° 4" 350 ±10 DSP 0.0039-0.0042 SEMI Prime, 1Flat, Free of Striations, Empak cst
6403 N/As [100] 4" 525 DSP 0.001-0.005 SEMI Prime, 1Flat, Empak cst, TTV<5μm
B788 N/As [110] ±0.5° 3" 420 DSP 0.001-0.007 SEMI Prime, in Empak, Primary Flat @ [1,-1,0]
TS018 N/As [100] 6" 575 ±15 DSP 0.0040-0.0041 SEMI Prime, 2Flats (PF @ <110>±1°, SF 135° from PF}, Laser Mark, Empak cst
TS127 N/As [100] ±1° 4" 360 ±15 DSP 0.0054-0.0067 SEMI Prime, 2Flats, TTV<5μm, Cassettes of 22 + 21 + 19 wafers

Germanium Wafers for Imaging Silica Particles Using Scanning Electron Microscopy (SEM)

We are a small company that works in particulate control for ultra high purity water and chemicals. We are involved in a project which requires imaging silica particles using SEM. The commonly used Silicon wafers do not give us contrast for EDX. Hence, we are interested in evaluating Germanium wafers for this application. We would be interested in undoped, epitaxy ready, single side polished wafers of high purity to give the required contrast for EDX. Could you give us a section of wafer around 1 inch in dimension to see if your product is suitable for our purposes? I understand the wafers are quite expensive, so any broken/unsellable piece would do. I would also appreciate a detailed spec sheet and pricing information.

We do not have a orientation requirement. We don't want anything super thin, because we are interested in cleaving the wafers. But we dont want anything prohibitively expensive either in terms of thickness. To begin with, we need only a small portion (1" or lesser) for evaluation. At least 99.9% purity. We will need more wafers once we evaluate the wafer as suitable.

UniversityWafer, Inc. Quoted:

Germanium Wafer 25.4mm Undoped <100> 0.5mm SSP $Contact us Reference #241246

What Exactly Does Scanning Electron Microscopy (SEM) Do?

SEM is based on high-energy electrons emitted from the surface of the sample, which are exposed to high temperatures, high pressure and light. The interactions between electron beam and sample produce an image, similar to the way an optical microscope uses light to capture images. Depending on the electron microscope used, the image created can reveal details about the surface and the internal composition of a sample. Scanning electron microscopy can produce a wide range of images, such as images of biological samples and chemical compounds.