Stochiometric Nitride on Silicon Wafer for R & D

University Wafer Silicon Wafers and Semicondcutor Substrates Services
University Silicon Wafer for Production

Stoichiometric LPCVD nitride

Stoichiometric LPCVD nitride is ideal for KOH etching mask and can be a very effective insulator. This versatile film can be used for the construction of MEMS devices and as a tool for defining the active region in the area of oxidation.

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What is Stoichiometric LPCVD nitride?

With this film, we have worked hard to develop the ability to use stoichiometric LPCVD nitride throughout the entire manufacturing process of the device. Because of the fast lead time, you can be sure that we can use them in many applications, and we encourage you to use them as a reservation option. Nitride runs are planned as soon as the wafers arrive at our plant and as early as possible after the first day of production.

Below are just some of the SiN inventory that we have.

ID Diam Type Dopant Orien Res (Ohm-cm) Thick (um) Polish Grade

100nm Stoichiometric LPCVD Nitride

3307 50.8mm P B <100> 0.001-0.005 270um SSP Prime
3538 50.8mm P B <100> 1-10 280um SSP Prime
3540 50.8mm P B <100> 1-10 280um SSP Prime
3546 50.8mm N P <100> 1-10 280um SSP Prime
3548 50.8mm N P <100> 1-10 280um SSP Prime
3554 76.2mm P B <100> 1-10 380um SSP Prime
3551 50.8mm N P <100> 1-10 280um SSP Prime
3556 76.2mm P B <100> 1-10 380um SSP Prime
3582 150mm P B <100> 1-100 625um SSP Prime
1911 100mm P B <100> 1-10 500um SSP Prime
1912 100mm P B <100> 0.001-0.005 500um SSP Prime
3580 150mm P B <100> 1-100 625um SSP Prime

300nm of Standard LPCVD Nitride

3541 50.8mm P B <100> 1-10 280um SSP Prime
3539 50.8mm P B <100> 1-10 280um SSP Prime
3547 50.8mm N P <100> 1-10 280um SSP Prime
3544 50.8mm P B <100> 1-10 280um SSP Prime
3549 50.8mm N P <100> 1-10 280um SSP Prime
3552 50.8mm N P <100> 1-10 280um SSP Prime
3555 76.2mm P B <100> 1-10 380um SSP Prime
3557 76.2mm P B <100> 1-10 380um SSP Prime
3563 76.2mm N P <100> 1-10 380um SSP Prime
3560 76.2mm P B <100> 1-10 380um SSP Prime
3568 76.2mm N P <100> 1-10 380um SSP Prime
1913 100mm P B <100> 1-10 500um SSP Prime
3570 100mm P B <100> 1-20 500um SSP Prime
3572 100mm P B <100> 1-20 500um SSP Prime
3583 150mm P B <100> 1-100 625um SSP Prime
3584 150mm P B <100> 1-100 625um SSP Prime
                 
3581 150mm P B <100> 1-100 625um SSP Prime
3565 76.2mm N P <100> 1-10 380um SSP Prime

620nm LPCVD Nitride

3445 50.8mm P B <100> 0-100 500um DSP Prime

2,000nm Low Stress LPCVD Nitride

3542 50.8mm P B <100> 1-10 280um SSP Prime
3550 50.8mm N P <100> 1-10 280um SSP Prime
3553 50.8mm N P <100> 1-10 280um SSP Prime
3569 76.2mm N P <100> 1-10 380um SSP Prime

200nm Low Stress Nitride

3446 76.2mm     <111>   250um DSP Test
3480 76.2mm ANY ANY <100>   250um DSP Test
3558 76.2mm P B <100> 1-10 380um SSP Prime
3566 76.2mm N P <100> 1-10 380um SSP Prime

100nm Low Stress LPCVD Nitride

3564 76.2mm N P <100> 1-10 380um SSP Prime

100nm Super Low Stress LPCVD Nitride

3567 76.2mm N P <100> 1-10 380um SSP Prime
1915 100mm N P <100> 1-10 500um SSP Prime
1917 100mm P B <100> 1-10 500um SSP Prime
1-10
1919 100mm N P <100> 1-10 500um SSP Prime
1-10
1921 100mm P B <100> 1-10 500um SSP Prime
1-10
1922 100mm P B <100> 0.001-0.005 500um SSP Prime
3455 100mm P B <100> 1-10 500 SSP Prime

2,000nm Low Stress LPCVD Nitride

3571 100mm P B <100> 1-20 500um SSP Prime
3573 100mm P B <100> 1-20 500um SSP Prime