Silicon Carbide Wafers & SiC Epitaxy 

Silicon carbide (SiC) wafers are the preferred substrate material for high-power electronics, RF devices, electric vehicles, renewable energy systems, and next-generation semiconductor technologies. Available in 4H-SiC, 6H-SiC, N-type, and semi-insulating grades, silicon carbide substrates offer superior thermal conductivity, high breakdown voltage, excellent chemical stability, and outstanding performance in high-temperature and high-frequency applications.

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Silicon Carbide (SiC) Wafers for Power Electronics and RF Applications

Silicon carbide (SiC) wafers are widely used in next-generation power electronics, high-frequency RF devices, electric vehicles (EVs), renewable energy systems, aerospace electronics, and advanced semiconductor research. Compared to traditional silicon, SiC offers higher breakdown voltage, superior thermal conductivity, faster switching speeds, and improved efficiency in high-temperature environments.

UniversityWafer, Inc. supplies 4H-SiC, 6H-SiC, and semi-insulating silicon carbide substrates for research, prototyping, and production applications. Available options include epi-ready surfaces, custom diameters, various dopants, and low micropipe density specifications.

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4H Silicon Carbide Wafer Applications

4H-SiC is the most widely used silicon carbide polytype for power semiconductor devices due to its excellent electrical properties and high electron mobility.

  • Power MOSFETs and Schottky Diodes
  • Electric Vehicle (EV) Power Modules
  • Solar Inverters and Renewable Energy Systems
  • Power Factor Correction Circuits
  • Industrial Motor Drives
  • High-Voltage Switching Devices
  • High-Temperature Electronics
  • Smart Grid Infrastructure

4H-HPSI Silicon Carbide Applications

High Purity Semi-Insulating (HPSI) 4H-SiC substrates are commonly used for RF, photonic, and advanced research applications where low parasitic conductivity is critical.

  • High-Power RF Amplifiers
  • 5G and Wireless Communication Devices
  • Graphene Growth Substrates
  • Terahertz (THz) Devices
  • Microwave Electronics
  • Optoelectronic Components
  • Quantum Technology Research
  • III-Nitride Epitaxy

Silicon Carbide Substrates and SiC Epitaxy

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UniversityWafer, Inc. supplies silicon carbide wafers and SiC epitaxy substrates for power electronics, RF devices, high-temperature electronics, graphene research, terahertz applications, optoelectronics, sensors, and semiconductor research. Available materials include 4H-SiC, 6H-SiC, N-type silicon carbide, and semi-insulating SiC wafers in multiple diameters and quality grades.

Epi-ready SiC substrates are available with controlled micropipe density, low surface roughness, and polished Si-face surfaces for epitaxial growth. Typical options include MPD-free wafers and grades with micropipe density specifications such as <5/cm2, <10/cm2, <30/cm2, and <100/cm2.

Silicon carbide wafers and SiC epitaxy substrates

SiC Epitaxy Specifications

  • Wafer Types: 4H-N, 4H-SI, 6H-N, 6H-SI
  • Dopants: Nitrogen-doped and Vanadium-doped options
  • Conductivity: N-type and semi-insulating silicon carbide
  • Diameters: <25.4mm, 25.4mm, 50.8mm, 76.2mm, 100mm and custom sizes
  • Polish: Single-side polished or double-side polished
  • Surface: Si-face epi-ready CMP finish
  • Surface Roughness: <0.5nm available
  • Epi Thickness Uniformity: Wafer-to-wafer thickness uniformity around 2%
  • Epi Doping Uniformity: Wafer-to-wafer doping uniformity around 4%

Popular Silicon Carbide Wafer Inventory

Current inventory includes a variety of 2-inch, 3-inch, and 4-inch SiC wafers. Please send your required diameter, polytype, orientation, dopant, resistivity, thickness, polish, micropipe density, and quantity so we can quote the best available stock or custom specification.

Wafer Type Diameter Dopant / Conductivity Orientation Thickness Grade / MPD Resistivity Polish / Surface
6H-N 2" / 50.8mm N / Nitrogen <0001> ±0.5° 330 ±25µm D Grade / MPD ≤100 cm-2 0.02-0.2 Ω·cm SSP, Si-face epi-ready CMP, Ra <0.5nm
6H-N 2" / 50.8mm N / Nitrogen <0001> ±0.5° 330 ±25µm B Grade / MPD ≤30 cm-2 0.02-0.2 Ω·cm SSP, Si-face epi-ready CMP, Ra <0.5nm
4H-N 2" / 50.8mm N / Nitrogen <0001> ±0.5° 330 ±25µm D Grade / MPD ≤100 cm-2 0.01-0.1 Ω·cm SSP, Si-face epi-ready CMP, Ra <0.5nm
4H-N 2" / 50.8mm N / Nitrogen <0001> ±0.5° 330 ±25µm B Grade / MPD ≤30 cm-2 0.01-0.1 Ω·cm SSP, Si-face epi-ready CMP, Ra <0.5nm
4H-N 3" / 76.2mm N / Nitrogen 4° ±0.5° 350 ±25µm D Grade / MPD ≤100 cm-2 0.01-0.1 Ω·cm DSP, Si-face epi-ready CMP, Ra <0.5nm
4H-N 3" / 76.2mm N / Nitrogen 4° ±0.5° 350 ±25µm B Grade / MPD ≤30 cm-2 0.01-0.1 Ω·cm DSP, Si-face epi-ready CMP, Ra <0.5nm
4H-SI 3" / 76.2mm Semi-insulating / V <0001> ±0.5° 350 ±25µm D Grade / MPD ≤100 cm-2 70% ≥1E5 Ω·cm DSP, Si-face epi-ready CMP, Ra <0.5nm
4H-SI 3" / 76.2mm Semi-insulating / V <0001> ±0.5° 350 ±25µm B Grade / MPD ≤30 cm-2 80% ≥1E5 Ω·cm DSP, Si-face epi-ready CMP, Ra <0.5nm
6H-SI 2" / 50.8mm Semi-insulating / V <0001> ±0.5° 330 ±25µm D Grade / MPD ≤100 cm-2 70% ≥1E5 Ω·cm SSP, Si-face epi-ready CMP, Ra <0.5nm
6H-SI 2" / 50.8mm Semi-insulating / V <0001> ±0.5° 330 ±25µm B Grade / MPD ≤30 cm-2 85% ≥1E5 Ω·cm SSP, Si-face epi-ready CMP, Ra <0.5nm
4H-N 4" / 100mm ±0.38mm N / Nitrogen 4.0° ±0.5° 350 ±25µm D Grade / MPD ≤100 cm-2 0.01-0.1 Ω·cm TTV / Bow / Warp <45µm

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