200mm Sapphire Wafers to Collect Polymer

university wafer substrates

200mm Sapphire Wafers to Collect Polymer

Sapphire wafers are scratch-resistant and have good thermal properties. Dimensions we need something that is 8'' (~200 mm) in diameter.

Researchers use 200mm Sapphire wafers to collect polymer out of the vapor phase under a vacuum.  The researchers distilled PMMA under vacuum then use the sapphire to evaporate off of and onto.

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Sapphire Dielectric & Optical Properties

Researcher ask:

I would be also curious what the dielectric properties and optical properties are, for another project as well. We do sometimes do ellipsometry and dielectric spectroscopy, so if this works in those systems as well I can justify buying more.

We would want to order probably 4 disks of 200 mm diameter. If I can find other uses for the sapphire we may be able to order 5-10.

UniversityWafer, Inc. Quoted the following:

8'' Sapphire disk. Also see below for the dielectric properties and optical properties.

Standard spec 8 inch sapphire substrate wafer
High Purity(>99.996%)and Monocrystaline Al2O3
Surface orientation: C-plane<0001> Off-axis 0.35 +/- 0.15deg towards M-axis<10-10>
Notch orientation: A-axis<11-20> +/- 0.3°
Notch Depth: 1.0 + 0.25/-0.00 mm/Notch per SEMI M1-1105
Notch Angle: 90 +5°/-1 ° Or Semi flat cut
Diameter: 200.0+/-0.25mm
Thickness: 1300um or 1600um
Front side surface: Epi-polished,Ra</=0.3nm
Back side surface: Fine-ground,Ra=1.0 +/- 0.2um
Wafer edge: Small protective chamfer
TTV: </=20um
BOW: </=30um
Packaging: Class 100 clean room,vacuum sealed
Qty. 4,5~10Nos.

pricing : $ usd/ea bases Qty. 04/5pcs
$ usd/ea bases Qty. 10pcs
lead time : 2~4 weeks

Dielectric properties and optical properties

Sr. No. Property Value
1 Material 99.996% pure Al2O3 (Alumina)
2 Material class according to DIN EN 60672 C795
3 Density 3.73 g/cc
4 Coefficient of thermal expansion
100° – 200° C 6.0 – 8.0 * 10 -6 /K
100° – 300° C 6.0 – 8.0 * 10 -6 /K
100° – 600° C 6.7 – 8.7 * 10 -6 /K
100° – 800° C 7.0 – 9.0 * 10 -6 /K
5 Dielectric constant (10 MHz to 1 GHz) 8.3 – 11.3
6 Dielectric loss factor (10 MHz to 1 GHz) ≤ 5 * 10 -3
7 Breakdown field ≥ 15 kV/mm
8 E-Modulus ≥ 300 GPa
9 Thermal conductivity at 20° C ≥ 22 W/m K
10 Volume resistivity at

20° C ≥1013 Ω-cm
200° C ≥1011 Ω-cm
400° C ≥109 Ω-cm
600° C ≥107 Ω-cm
11 Water absorption ≤ 0.1%

12 Light transmission characteristics: T>/=80% (0.3~5μm)

Refractive index: no =1.768 ne =1.760