PMN-PT Crystal Substrates

university wafer substrates

What PMN-PT Single Crystal Material Do We Have?

We can supply four types of products based on PMN-PT single crystal material.

  1. PMN/PT-on-Si wafers
  2. PMN/PT-on-SOI wafers
  3. double PMN/PT wafers
  4. Actuators based on (1)-(3) per customer defined device size and shape.

We have5 00um thick, 200um thick, and ultrathin 50um thick PMN-PT on sale. This amazing piezoelectric material are offered in both square and circular shap with Cr/Au coating available.
What we offer are both square or circular shape with Cr/Au already coated.

Reference #143050 for specs and pricing.

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Single Crystal PMN-PT to Fabricate Actuators

A postdoctoral researcher requested a quote on PMN-PT materials specs.

Single crystal PMN-PT, <100> at this stage with d31~1000. <110> parts will be offered in the future.

Dimension:
PMN-PT, 22.5mm squares, 50um thickness. Electrode coating on both sides.
We have also 45mm squares with thickness 50um, 75um, 200um, and 500um.
We also accept orders for customized size, thickness, and shapes.

Handling: thin sheet in attachment with a thick Silicon carrier substrate by using either wax as bonding agent, or a polymer layer as bonding.
We can supply freestanding parts of PMN-PT

This plant also supplies four types of products based on PMN-PT single crystal material

(1) PMN/PT-on-Si wafers
(2) PMN/PT-on-SOI wafers
(3) double PMN/PT wafers
(4) Actuators based on (1)-(3) per customer defined device size and shape.

Reference #142995 for specs and pricing.

Freestanding 50 Micron Thick PMN-PT Substrate

Single crystal PMN-PT, <100> at this stage. <110) are available.

Dimension:
PMN-PT, 22.5mm squares, 50um thickness. Electrode coating on both sides.
We have also 45mm squares with thickness 50um, 75um, 200um, and 500um.
We also accept orders for customized size, thickness, and shapes.

Handling: thin sheet in attachment with a thick Silicon carrier substrate by using either wax as bonding agent, or a polymer layer as bonding.
We can supply freestanding parts of PMN-PT

Reference #142988 for specs and pricing.

PMN-PT CrystalStructure Data

A graduate student requested a quote for the following:

I am looking for PMN-PT single crystal substrates. I have couple of questions.

  1. How size of PMN-PT could you prepare? I wanna 10x10mm; at least 5mmx5mm.
  2. Do you have crystal structure data?
  3. Do you have piezoelectric data of this subs? for example d33 and d31 etc.
  4. What orientation do you have? (100),(110) and (111)?

I would appreciate you if you reply them.
Also, could you give me a quotation of PMN-PT subs with 500um and 200um thick?

Please reference #143079 for answers, specs and pricing.

Benefits of polymer over Theral Oxide for PMN-PT Substrates

A materials scientist requested help with the following:

Could you send me more information about the buried polymer layer instead of thermal oxide an I am also interested in your PMN-PT material.

The polymer layer is spin on before bonding, the material is resistant to KOH etching and resistant to HF etchant as well. It can withstand 158C long term and can be etched by O2 plasma quickly.

The benefits lies for MEMS community in that wafers with polymer buried layer instead of thermal oxide has much less stress, and as a result, in releasing MEMS structure, the thin (for example 2um-20um thick) MEMS features won't be deformed due to tox. The deformed MEMS features will cause problem in RIE silicon etching and cause structure stiction to supporting substrate. Also, the polymer buried layer can be easily clean by dry method such as O2 plasma.

Reference #143051 for specs and pricing.

Is PMN-PT Single Crystal?

A PhD researcher requested the following:

Please send me more information about your 50um thick PMN PT material: available lateral dimension, handling.

Is this material a single crystal material?

Material: available lateral dimension, handling.

UniversityWafer, Answered:


Yes. Single crystal PMN-PT, <100> at this stage. <110) will be available in the future.

Dimension:
PMN-PT, 22.5mm squares, 50um thickness. Electrode coating on both sides.
We have also 45mm squares with thickness 50um, 75um, 200um, and 500um.

We also accept orders for customized size, thickness, and shapes.

Handling: thin sheet in attachment with a thick Silicon carrier substrate by using either wax as bonding agent, or a polymer layer as bonding.

We can supply freestanding parts of PMN-PT

PMMA-PT Parallelism Specifications

We are looking for PMMA wafers 2mm thick polished both sides.  Quantity depends on the size of wafers available.

Other specs;
Surface flatness = 3 microns
Parallel = 3 microns

Diameter of wafer determines how many we need. Our finished part size is 20mm x10mm. We need 50 rectangles 20 mm x 10 mm.

Can you provide the PMMA wafers 2mm thick, lapped both sides to 3 microns flat?

Size: 100mm diameter or 150mm diameter

Quantity: 4 wafers or minimum buy.

We can supply 20 mm x 10 mm x 2 mm thick single crystal PMN-PT grown in the <001> direction with 3 micron flatness and 3 micron parallelism specifications. 

We do have the ability to provide a fine surface finish of less than 50 nm, but I am not sure if this will meet your needs. 

The price per wafer will be $500/wafer.  If you can make them thinner, the price can come down as follows: 

2 mm Thick:        $wafer
1 mm Thick:        $wafer
0.5 mm Thick:    $wafer

 Please review this information and let me know how you would like to proceed.  From this I can supply a formal quote and we can get moving.

What Are PMN-PT Crystal Substrates?

PMN-PT thin films are highly functional materials for pyroelectric energy scavenging, cooling, and evaporative power generation. However, chemical analysis of the resulting thin films is difficult due to low analytical sensitivity and peak overlaps.

Figure 1a shows a high-resolution omega-2theta scan of the [001]-oriented PMN-PT single crystal. A large full-width at half-maximum is observed around the individual Bragg reflections indicating a domain-like structure of the PMN-PT lattice.

How PMN-PT Works

The PMN-PT material is unique in that it demonstrates a large piezoelectric effect in thin film form. This makes it suitable for applications including sensors and actuators. Piezoelectric MEMS devices convert electrical energy to mechanical energy to enable active transduction between electrical and mechanical signals. The relaxor ferroelectric Pb(Mg1/3 Nb2/3)O3-PbTiO3 (PMN-PT) is particularly well suited because it exhibits a much larger piezoelectric response than other piezoelectric materials, allowing MEMS designers to incorporate the material into ultra-thin, high performance devices.

To fully exploit the potential of PMN-PT, it is necessary to understand the structural and morphological characteristics of the material on substrates. This is especially important since the material is very fragile and requires special handling to prevent shock damage and short circuits during experimentation or manufacturing.

X-ray diffraction and Raman polarimetry provide information on the long-range structure, while transmission electron microscopy and micro-Raman spectroscopy probe the structure at the nanoscale. Micro-Raman polarimetry reveals that the studied PMN-xPT films present a local tetragonal-like polar phase, which explains the discrepancy between the cubic-like structure of the diffraction data and the macroscopic dielectric, ferroelectric, and piezoelectric properties that are indicative of a non-centrosymmetric material.

In addition, FIB cutting enables the formation of PMN-PT structures with desired out-of-plane orientations. Typical PMN-PT crystal structures include nanobelts, nanorods and nanowires. The morphology of the FIB-cut PMN-PT nanobelt can be further characterized by a 3D topographical map and SEM image.

PMN-PT Sensors

PMN-PT is a very promising material for applications including sensors and actuators. The piezoelectric properties of the material offer high responses to electric fields and are highly sensitive to vibrations. These properties make the material suitable for miniaturized directional vector sensors such as acoustic SONAR and other applications in which small size is a critical requirement.

The properties of the material are well-characterized and can be analyzed using standard techniques such as X-ray diffraction, X-ray fluorescence, field emission scanning electron microscopy and polarization-electric field hysteresis. PMN-PT thin films can be fabricated by a variety of techniques. The fabrication process can be simple and maskless, allowing for the creation of devices with small gaps of high aspect ratio.

A study of the ultrasonic pulse-echo response waveforms of the PIN-PMN-PT thin film has shown that the performance of the device is largely dependent on its front matching layer. The performance of the acoustic transducer can be improved by decreasing the thickness of the front matching layer.

The results also show that the LNO layer exhibits high-order resonant modes, which can be used to enhance the response of the acoustic transducer. A cross-sectional micrograph of the acoustic transducer shows that the resonant mode frequencies increase with the increasing PT content of the crystal. The resonant modes have an average energy of approximately 150 kHz and are separated by a distance of about 20 nm. The resonant modes can be excited by green laser pulses of duration below approximately 1.5 fs without significant heating effects and with limited redeposition of ablated material on the surface.

PMN-PT Actuators

As with sensors, PMN-PT’s superior mechanical attributes also make it well suited to actuator applications. For example, it has been shown that it can put far more ultrasonic acoustic energy into a small volume than any piezoceramic material can, which has been very useful in the fabrication of ultra-miniature ultrasound sources that go inside exploratory catheters to scan tissue quality from inside!

We have demonstrated the femtosecond laser micro-fabrication of lead-magnesium-niobate lead titanate (PMN-33% PT) single crystal substrates to fabricate high-frequency needle ultrasound transducers. Ablation thresholds were measured by plotting the square of the radii of the ablation craters generated by the pulses versus the logarithm of the pulse energy; the values were found to be very reproducible with a high degree of repeatability for pulse energies up to approximately (5.5,upmu hbox J).

We have also developed a two degrees-of-freedom (DOF) ultrasonic micromotor based on PMN-PT single-crystal square-bar actuators and Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 ceramics. The motor generates standing wave elliptical motions of the slider in two orthogonal vertical planes using a combination of first longitudinal and second bending vibration modes. The motor drives the slider with a driving force of 0.25 N under a voltage of 80 Vpp at its resonance frequency of 87.5 kHz. The resulting displacements of the slider are 5-times larger than those of PZT actuators prepared from bulk ceramics or thick films.

PMN-PT Applications

This PMN-PT material exhibits a large piezoelectric effect as the PT content increases along the growth direction due to chemical segregation. This effect is enhanced when the substrates are patterned with electrodes, as shown in Figure below. When the electrodes are applied a voltage of 400 V, an elliptical ring of 660 nm x 660 nm is generated around the electrodes. This causes a tensile strain in the substrate of about 600 me, a value that matches the maximum tensile strain predicted by our finite element simulation.

Using the same technique of continuous feeding crystal growth as with the Bridgman method, we can optimize the properties of PMN-PT for application in sensor and actuator devices. By choosing the right starting composition, we can tune the properties of PMN-PT along the growth direction, for instance by selecting a PT concentration close to the MPB in the rhombohedral phase to obtain optimal dielectric and piezoelectric characteristics.

For a more detailed analysis of the chemical composition of PMN-PT, we characterized the films by using quantitative electron probe microanalysis by wavelength-dispersive X-ray scattering (WDXS) that is coupled with scanning transmission electron microscopy (STEM). Since WDXS is a non-destructive technique, it allows us to determine the full occupancy of the A-site cations in the perovskite lattice, i.e., whether the stoichiometry is achieved or not.