What Substrate is Used to Fabricate Wearable Sensors?

university wafer substrates

What Silicon Wafers Are Used to Fabricate Wearable Sensors?

Rearchers have used the following silicon wafer to fabricate micro-pojection array for wearable sensor:

6 inch P/B (1-0-0) 1-20 ohm cm, 1300+/-25um TEST SILICON WAFER, SSP PRIMARY FLAT ONLY

Reference #270518 for pricing.

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Below are just some key terms used in wearable sensor research.

  • biocompatible sensors
  • flexible sensors
  • wearable sensors
  • sensor suitability
  • analysis sensor
  • strain sensors 
  • array sensors
  • use sensors
  • sensor array 
  • lectrochemical sensors
  • wearable technologies
  • flexible tactile 
  • calibration algorithm  
  • sensor systems 
  • sensor devices    



Fabrication of Micro Projection Array for Wearable Sensors

A new technique developed by UC Berkeley engineers will allow medical researchers to develop wearable sensors faster and at a lower cost. The novel approach eliminates the need for clean rooms and a multistep photolithography process. Instead, researchers can use a $200 vinyl cutter to manufacture small batches of sensors. The method cuts the development time for sensors by 90%. The technique was developed by Renxiao Xu, a Ph.D. student in mechanical engineering at Berkeley.

wearable devices

Common Materials: Gold-based nanomaterials, Carbon-based nanomaterials, magnetic nanoparticles

Graphene powder was transferred to Kapton tapes

The transfer of graphene powder to Kapton tapes enabled fabrication of a micro projection array for wearable sensors. These sensors are suitable for a wide variety of emerging applications. For example, they could be fastened to surfaces of mechanical and infrastructure systems. Moreover, they could be used for real-time data-stream monitoring.

The transfer of graphene powder to Kapton tapes was accomplished using a two-step process. First, graphene powder was transferred to a thin PDMS film, and then to a Kapton tape. The resulting pattern still retained the original pattern features of the graphene structures in the channel. The second step involved thermal annealing of the tape. Thermal annealing can improve the adhesion of the graphene film to the tape.

The transfer of graphene powder to a Kapton tape was accomplished using a PDMS negative patterning technique. The process required a few micrometer-scale graphene structures on the PDMS surface. The resulting transfer patterns had high spatial resolution and retained most of the original features of the PDMS surface.

The transfer of graphene powder to Kapton tapes allows the fabrication of a micro projection array for wearable sensors. This is a flexible and conformal assembly that allows for additional layers to be added. The sensor can be mounted on human or animal skin. The sensor can monitor the movement of an object, identify its shape, and detect pressure profiles.

A thin film of graphene is hard to peel away without damaging the sensor. Therefore, this technique is best used to produce a thick film of graphene. Once the film is thick, it can be difficult to peel it away and can be difficult to break with tape peeling. In addition, it's difficult to pattern a thick graphene film using the D2SP process, so sequential applications of the D2SP process are performed.

Au film-based electrode with ultrathin gold nanowires

The ultrathin gold nanowires are mechanically flexible and robust. They are able to form novel superlattice nanomembranes and flexible transparent electrodes with superior electrical and mechanical properties. However, despite their mechanical and electrical properties, this material has not been widely used in wearable sensors.

AuNS electrodes have an excellent phase angle and impedance, which makes them ideal for use in ECG and EMG sensors. They are also stretchable, which makes them perfect for a variety of applications. They also show excellent adhesion to PDMS and other materials.

Au film-based electrodes can be fabricated with a variety of techniques, including vertical contact separation mode. The gold nanowires are embedded in a stretchable material, which makes them a perfect solution for wearable sensors. In addition, the electrodes can be flexible and transparent, which can be helpful in sensing various types of motion.

The stretchable electrodes were tested to ensure their resistance and sensitivity. They exhibited high durability and electrical conductivity even after over 1000 cycles of stretching and releasing. The electrodes were also heat-treated to improve their mechanical and electrical properties and reduce their resistance.

AuNWs-based sensors can detect pressure as low as 13 Pa, equivalent to the weight of a droplet on a 10 mm2 surface. The sensors can also detect noise-free continuous responses up to 2,600 Pa. These sensors have the potential to be used in a variety of applications, including wearable medical devices and health monitoring systems.

In addition to a tissue-based electrode, the gold nanowires are also deposited onto a PDMS substrate to make an interdigitated electrode. The thickness of each pixel is approximately 3 nm. The interdigitated electrodes are then deposited onto a PDMS substrate using an electric beam evaporator.

This electrode also has the potential to be highly stretchable and is based on a polymer matrix. The materials used for the electrodes must be highly conductive. In addition to this, the design of the electrodes is critical because they determine the effectiveness of accumulating charges and the flow of current. Nanostructured conductive materials are able to maintain their orientation and integrity under repetitive stretching cycles.

Carbon nanotubes

This invention relates to carbon nanotube arrays for biological or chemical sensing. The arrays are made up of first electrodes with an array of carbon nanotubes and a second electrode. The array is then placed over an air gap and a measuring device is provided for detecting the changes in the electrical capacitance.

These carbon nanotube electrode arrays are useful for a variety of applications, including biotechnology and communications. They can be used for sequencing DNA or separating chemicals. They are also useful as signal transducers. Moreover, they can be produced using standard semiconductor fabrication facilities.

The use of carbon nanotubes as electrodes is becoming more prevalent in electronics. They are considered as a viable replacement for Indium Tin Oxide (ITO) transparent conductors. In fact, the cost of carbon nanotubes has decreased significantly in recent years, and they are now available in printable form.

Single-wall carbon nanotubes are essentially seamless cylinders. Single-walled carbon nanotubes can be formed by rolling up a graphene sheet. They have walls of 5 to 50 nanometers. Depending on their diameter and chirality, nanotubes exhibit different electrical properties. The diameter of a single-wall carbon nanotube is inversely proportional to its chirality, and its dimensionality defines its polarity.

Carbon nanotubes can be used to fabricate a variety of functional systems. They can be incorporated into displays, sensors, and even electronic skins. One such application is the stretchable E-skin. These devices can be mass-produced and integrate interface electronics and sensor electronics into the same package. In addition, they can be used as a substitute for pressure sensors.

One important challenge for the development of wearable sensors is obtaining flexible and breathable materials. In addition, it is critical to develop a power unit for these sensors. The power unit must provide the appropriate voltage and must be non-toxic and have a long lifetime.

The growth rate of TiO2 nanotubes was approximately 340 nanometers per minute. After anodizing the nanotubes, Au was inserted between the interspaces of the array. They were then patterned with a submicron mask layer. The resulting arrays were tested by measuring the incident photon-to-current conversion efficiency.


Fabrication of a micro projection array is a promising method for a wearable sensor. These sensors are composed of a series of microneedles that can penetrate the skin and measure analytes of interest electrochemically. The measurements can be repeated every 5 minutes or more often as required. The lifetime of the sensors can be about 7 days. The arrays can be replaced after this time. The results are then sent via Bluetooth to a companion smartphone. The data is then compiled into a graph.