E-Beam Evaporated Metals on Silicon Wafers

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E-Beam Evaporated Metals on Your Wafers

Our E-Beam evaporation process provides excellent film thickness control and can deposit up to six different materials in-situ. E-Beam evaporation is often used when precious metals deposition is required and is an excellent choice for wafers that require lift-off processing.

In order to ensure the best results for metal lift-off, the underlying wafer and photoresist must be kept cool during metal deposition. This can be difficult to achieve while depositing thick layers. We along with our partners Micro-devices has developed a specialized low temperature E-Beam evaporation process specifically for use during metal lift-off processing.

The surface preparation of patterned silicon and quartz wafers intended for lift-off metal is also extremely important. We include photo-resist bake and O2 descum steps just prior to deposition to improve film adhesion.

 

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Evaporated Metals Available:

  • Aluminum
  • Chromium
  • Copper
  • Gold
  • Indium Tin oxide
  • Platinum
  • Nickel
  • Silver
  • Titanium Tin

Films available for deposition

We offer a wide variety of E-Beam evaporation precious and non-precious metals. Non-precious metals and dielectric materials are available for sputtering.

E-Beam Evaporated Metals

Electron beam evaporation, commonly referred to as e-beam evaporation, is a process used in the production of electronic and optical films and photovoltaics. It is used for the deposition of electronic or optical films for the semiconductor industry and is used in displays and photivoltaics. [Sources: 12, 15]

The high melting point of these materials can be deposited in liquid form and is therefore suitable for the production of electronic and optical films as well as for photovoltaics. However, some materials such as metal oxide nanostructures cannot evaporate because they cannot evaporate and some of them can evaporate with difficulty. The evaporation of the laser beam can facilitate the coating of e-coatings by evaporation. This is achieved by the VLS process, in which metal oxides and nanoscale structures are synthesized from a combination of high and low pressure laser beams. [Sources: 0, 2, 12, 14]

If you have any questions about electron beam evaporation products, please contact us for sales at semicore.com and fill out the contact form or call us at (925) 373-8201. Let our helpful support staff answer any question you had, what e-beam evaporation is and how to implement it by calling us. If you are familiar with these materials, as some people are doing, you can also quote Arun Elektron on his website or contact him by e-mail. [Sources: 2, 3, 9]

E - Beam Evaporation is capable of transferring pure and precise metal coatings requiring high melting temperatures to substrates at the atomic and molecular level to a substrate at the atomic or molecular level through a variety of applications. The concentration of the electron beam method now makes high-frequency deposition possible, a factor of interest for production-oriented businesses. [Sources: 3, 9]

Of all the vacuum-based processes, the ones that best serve the semiconductor industry are the evaporation and sputtering of electron beams. The vacuum separation techniques listed in the table are listed below, along with their performance and cost-effectiveness. [Sources: 4, 10]

As discussed in an earlier blog, there is an e-jet evaporation process, which is a thermal evaporation process. In the evaporation of the electron beam (e - beam), a material is heated with an electron beam, in contrast to thermal evaporation, in which resistant heating is used. Unlike a resilient boat that flows through a high current, a small portion of the starting material is heated while it is heated in electron beams of the EvAPoration by the electrons generated by tungsten filaments and accelerated by electrons. [Sources: 3, 6, 7]

The beam is directed from a tungsten crucible to the anode, which contains the material deposited at a pH angle. After evaporation, anodes with negative charge apply a large voltage and an electron - focus magnet - to the target source material. The finest filaments are placed in such a way that the electrons from the electron beam collide with the materials and evaporate when applied by the magnet. [Sources: 1, 3]

Due to the intensity of the heat generated by the electron beam, the evaporation tank must be water - cooled to prevent melting. The cooker plate used for electrons - beam separation is advantageous in avoiding thermal loads - produced interactions between copper and cooker and ensured uniform heat distribution from the starting material. We have a single inverted cone ("pocket"), which is used to hold the target material and hold a copper crucible in which the material is melted. [Sources: 3, 5, 9]

Angstrom Engineering Evovac is an electron beam evaporator that can deposit up to 6% of the sample and has the potential to deposit up to 10% in an in situ substrate purification process (performed with an ion mill). The device consists of a vacuum evaporator that houses the electron source that generates electrons, accelerates, deflects with the electron beam, and the crucible hearth that holds the evaporating material. Electron beam separation sources are equipped with an electromagnet that forms and positions the electron flow and a water-cooled copper stove that contains the deposited starting material. We use a single copper plate with a thickness of 1.5 mm to 2 mm, which is applied to a heated substrate after cleaning the substrates by ion mills. [Sources: 5, 6, 8, 14]

The electron beam has a high electricity density and the evaporation of various materials is possible, including sublimating substances. In view of the experimental results, we believe that the high-density electron beams could easily decompose metal oxides and form high partial pressures - low in temperature and oxygen - that can form at low oxygen and partial pressure. The high densities of electrons in the beam could easily decompose metal oxide and easily decompose metal oxides (e.g. copper oxide, nickel oxide). [Sources: 0, 14]

Currently, various processes are used to produce optical thin films, of which the electron beam ions are most commonly used - assisted deposition. As already mentioned, this process is responsible for the deposition of high-temperature metal oxides (e.g. copper oxide, nickel oxide) and their evaporation. Thermal evaporation uses the low melting point of the material during the lifting of an e-beam resistance, which does not produce a stray X-ray that produces an E-beam evaporation. E - Blasting evaporation is oriented to heating the starting material and therefore better from the purity point of view. [Sources: 6, 11, 13]

 

 

Sources:

[0]: https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5377458/

[1]: https://www.mdpi.com/2079-6412/10/3/211/htm

[2]: http://article.sapub.org/10.5923.c.materials.201502.04.html

[3]: http://www.semicore.com/news/89-what-is-e-beam-evaporation

[4]: https://compoundsemiconductor.net/article/96507/The_Resurgence_Of_Electron_Beam_Evaporation/feature

[6]: http://lnf-wiki.eecs.umich.edu/wiki/Evaporation


[8]: https://www.utoledo.edu/research/pvic/material_deposition.html

[9]: https://www.tungsten.com/tips/electron-beam-evaporation/


[11]: https://www.findlight.net/blog/2019/06/30/electron-beam-evaporation/

[12]: https://nanomelbourne.com/services/thin-films/

[13]: https://www.reoinc.com/technical-resources/cat/78/technical-tutorials/article/Coating-Process-Tutorial

[14]: https://www.jeol.co.jp/en/science/eb.html