Substrates for Fabrication of Nanoimprint Devices

university wafer substrates

Researcher Applications of Substrates for Nanoimprint Devices

"The test substrate I purchased recently are simply used as substrates for SU-8 for frabrication of nanoimprint and microfluidic devices.

The prime grade 0.01 ohm-cm p-type <100> we purchased recently are used for metal assisted chemical etch of silicon leading to the fabrication of porous silicon nanoneedles, the ones that we recently featured in the paper attached below."

Reference #203065 for specs and pricing.

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Substrates Used To Fabricate Nanoimprint Devices

There are a variety of substrates that can be used to fabricate nanoimprint devices, depending on the specific application. Some common substrates used in nanoimprint lithography include:

  1. Silicon wafers: Silicon wafers are commonly used as a substrate for nanoimprinting due to their high thermal stability and excellent mechanical properties. They are also widely available and relatively inexpensive.

  2. Glass: Glass substrates can also be used in nanoimprint lithography. They are often used for the fabrication of optical devices, such as waveguides and microlenses.

  3. Polymer: Polymer substrates such as polycarbonate, polyethylene terephthalate (PET) or polydimethylsiloxane (PDMS) are also used in nanoimprint lithography. They have the advantage of being flexible, transparent and relatively cheap.

  4. Metal: Metal substrates such as gold, silver, copper and aluminum are also used in nanoimprint lithography. They have the advantage of being conductive and have good thermal stability. They are used in applications such as interconnects, memory devices and sensors.

  5. Ceramic: Ceramic substrates such as alumina, silicon nitride and silicon carbide can also be used in nanoimprint lithography. They have high thermal stability and excellent mechanical properties. They are used in applications such as micro-electromechanical systems (MEMS).

It's worth noting that the substrate selection for nanoimprint lithography depends on the specific application and the properties required for the device. The substrate must be able to withstand the temperature and pressure of the nanoimprint process, and it should have the necessary properties for the specific device being fabricated.

How We Help Researchers Finding The Right Substrate

A postdoc asked for a quote on the following:

Could you please give me quotation of 5 pieces of double side polished 100mm Quartz wafers, 525 micrometer thickness with Standard cut? One question – Can these wafers be used for Mould creation for UV-nanoimprinting lithography?

UniversityWafer, Inc. Replied:

I am not sure the detail process. But for my knowledge , JGS2 (Fused Silica) is not suitable to work for UV-end application attached is the Transmittance of KGS2 . you will find that JGS2 is good for Optics range from 400nm -70nm . UV-nanoimpring will work at 200nm -280nm . so it;s not good for this application , you can use JGS1 Fused Silica!

Please reference #246127  for specs and pricing.

Silicon Substrates to Fabricate PDMS Soft Stamps

A postdoc asked the following:

I need a NanoImprint (NIL) stamp master. In other words, I need a silicon-based mask that can be used to generate PDMS soft stamps. The pattern is a straight line with width and spacing of 50 um and 100 um respectively. The aspect ratio is 1:1. I wanted to know your company produces such a 6inch or 4 inch (diameter) wafer.

UniversityWafer, Inc. Replied:

Q1) The profile of the structures should be squared (like after dry etching) or can be rounded (using direct deposition of silver paste method)?
Q2) What is the quantity of NIL stamp masters?

Reference #254868  for more information.

Fused Silica Plates for Nanoimprint Research

A postdoc requested the following quote:

"We would like to purchase one or two fused silica plates, diameter around 1cm, thickness around 1mm. And we need it single side polished, one surface smooth and one surface rough. Do you have any standard samples for us to purchase? Or do we need to purchase the customized samples? Can I also get a quote for them? Thanks! Since it is preliminary research purpose, lower price is preferable. Dimensions can be a little bit flexible. We would like to have one surface smooth, one surface with roughness around 1000-3000nm, for our nanoimprint purpose. Since it is a preliminary research, my supervisor said SSP is also fine (The roughness for polished side is <10A, and the grind side is 14-20um). Can we just purchase three plates if it is okay? "

Please reference #254869 for specs and pricing.

Corning Eagle Glass Substrates for Nanoimprint Research

An industry researcher requested the following:

"I’m looking around to find some Gen2 size (370mm x 470mm or 380mm x 480mm) Corning Eagle Glass substrates (either 0.7mm or 1.1mm in thickness). I order a few 4” and 8” size ones from you but I’m not sure if you provide bigger size like Gen2 size. If yes, could you please let me know the price and lead time? Thanks for your help!"

Please see below for answers:

Thanks for quick response. I’m very excited that you could provided Gen2 size eagle glass substrates. I have a few more questions before moving forward. 

Q1) Except for 470mm x 370mm, the other one I’m looking for is actually 480mm x 380mm (not 480mm x 370mm in the quote). I hope it is just a typo and not a big issue for you.

A1) You’re absolutely right, it was a typo on my end.  I’ve adjusted it below and pricing is good as I quoted per your descriptions.

Q2) What kind of cleaning process are used for such big substrate if any?

A2) These are cut only after a double sided plastic is applied to the immaculately clean raw material.  We find this allows us to protect the glass and present it to the customer in mint condition.

Q3) How are the glasses packaged for transportation? These are sealed with bubble wrap and adequate protection in double walled cardboard box with foam to protect edges of box.

A3) Will they be packed in the box without touching each other? Yes

Q4) If larger amount is order, is there any discount for the unit price? And what about the lead time?

A4) Next discount occurs at (250) + quoted below.  Lead time for that material is dependent on qty. ordered, but will definitely ship partials beginning 3 weeks ARO and potentially even meet or beat that time frame for a complete order if a larger order.

Please reference #256791 for specs and pricing.